JPH029425U - - Google Patents
Info
- Publication number
- JPH029425U JPH029425U JP8788688U JP8788688U JPH029425U JP H029425 U JPH029425 U JP H029425U JP 8788688 U JP8788688 U JP 8788688U JP 8788688 U JP8788688 U JP 8788688U JP H029425 U JPH029425 U JP H029425U
- Authority
- JP
- Japan
- Prior art keywords
- utility
- scope
- induction heating
- registration request
- graphite base
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 2
- 229910002804 graphite Inorganic materials 0.000 claims description 2
- 239000010439 graphite Substances 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims 1
- 230000006698 induction Effects 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Description
第１図は本考案の一実施例に係るサセプタの一
部断面斜視図、第２図は同平面図、第３図は第１
図の部の拡大図、第４図は本考案の他の実施例
に係るルツボの一部断面斜視図である。
１……サセプタ、１ａ……黒鉛製基体、２……
座ぐり面、３……ネツト。
FIG. 1 is a partially sectional perspective view of a susceptor according to an embodiment of the present invention, FIG. 2 is a plan view of the same, and FIG.
FIG. 4 is an enlarged view of the illustrated part and a partially sectional perspective view of a crucible according to another embodiment of the present invention. 1... Susceptor, 1a... Graphite base, 2...
Counterbore, 3...net.
Claims (1)
高周波誘導加熱に適した部材。 A member suitable for high-frequency induction heating, consisting of a highly heat-resistant metal embedded in a graphite base.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988087886U JPH0644096Y2 (en) | 1988-07-01 | 1988-07-01 | High frequency induction heating susceptor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988087886U JPH0644096Y2 (en) | 1988-07-01 | 1988-07-01 | High frequency induction heating susceptor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH029425U true JPH029425U (en) | 1990-01-22 |
| JPH0644096Y2 JPH0644096Y2 (en) | 1994-11-14 |
Family
ID=31312475
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988087886U Expired - Lifetime JPH0644096Y2 (en) | 1988-07-01 | 1988-07-01 | High frequency induction heating susceptor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0644096Y2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04129434U (en) * | 1991-01-25 | 1992-11-26 | ハリソン電機株式会社 | illuminated push button switch |
| JP2018533201A (en) * | 2015-08-17 | 2018-11-08 | アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ | Heating source for spatial atomic layer deposition |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62170627U (en) * | 1986-04-17 | 1987-10-29 |
-
1988
- 1988-07-01 JP JP1988087886U patent/JPH0644096Y2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62170627U (en) * | 1986-04-17 | 1987-10-29 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04129434U (en) * | 1991-01-25 | 1992-11-26 | ハリソン電機株式会社 | illuminated push button switch |
| JP2018533201A (en) * | 2015-08-17 | 2018-11-08 | アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ | Heating source for spatial atomic layer deposition |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0644096Y2 (en) | 1994-11-14 |