JPH02103178U - - Google Patents
Info
- Publication number
- JPH02103178U JPH02103178U JP1325089U JP1325089U JPH02103178U JP H02103178 U JPH02103178 U JP H02103178U JP 1325089 U JP1325089 U JP 1325089U JP 1325089 U JP1325089 U JP 1325089U JP H02103178 U JPH02103178 U JP H02103178U
- Authority
- JP
- Japan
- Prior art keywords
- cryopump
- conductance
- bellows
- variable
- buttful
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005855 radiation Effects 0.000 claims description 2
- 238000005452 bending Methods 0.000 claims 1
- 238000001816 cooling Methods 0.000 claims 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1325089U JPH02103178U (enExample) | 1989-02-06 | 1989-02-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1325089U JPH02103178U (enExample) | 1989-02-06 | 1989-02-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02103178U true JPH02103178U (enExample) | 1990-08-16 |
Family
ID=31223396
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1325089U Pending JPH02103178U (enExample) | 1989-02-06 | 1989-02-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02103178U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10006451B2 (en) | 2015-03-31 | 2018-06-26 | Sumitomo Heavy Industries, Ltd. | Cryopump |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60178982A (ja) * | 1984-02-27 | 1985-09-12 | Toshiba Corp | クライオポンプ |
-
1989
- 1989-02-06 JP JP1325089U patent/JPH02103178U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60178982A (ja) * | 1984-02-27 | 1985-09-12 | Toshiba Corp | クライオポンプ |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10006451B2 (en) | 2015-03-31 | 2018-06-26 | Sumitomo Heavy Industries, Ltd. | Cryopump |