JPH0169187U - - Google Patents

Info

Publication number

JPH0169187U

JPH0169187U JP1987165136U JP16513687U JPH0169187U JP H0169187 U JPH0169187 U JP H0169187U JP 1987165136 U JP1987165136 U JP 1987165136U JP 16513687 U JP16513687 U JP 16513687U JP H0169187 U JPH0169187 U JP H0169187U

Authority

JP

Japan

Prior art keywords

wall surface

getter

cooling shroud

evaporates

heats

Prior art date

1987-10-28

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000001816 cooling Methods 0.000 claims description 13
• RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 6
• 229910052719 titanium Inorganic materials 0.000 claims description 6
• 239000010936 titanium Substances 0.000 claims description 6
• 239000000463 material Substances 0.000 claims 4
• 230000002093 peripheral effect Effects 0.000 claims 1
• 238000005086 pumping Methods 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 2
• 230000004048 modification Effects 0.000 description 1
• 238000012986 modification Methods 0.000 description 1