JPH0210006U - - Google Patents
Info
- Publication number
- JPH0210006U JPH0210006U JP8465588U JP8465588U JPH0210006U JP H0210006 U JPH0210006 U JP H0210006U JP 8465588 U JP8465588 U JP 8465588U JP 8465588 U JP8465588 U JP 8465588U JP H0210006 U JPH0210006 U JP H0210006U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- cutting
- cutting tool
- suction stage
- cuts
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 3
- 230000003028 elevating effect Effects 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000001179 sorption measurement Methods 0.000 description 1
Landscapes
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8465588U JPH0210006U (no) | 1988-06-27 | 1988-06-27 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8465588U JPH0210006U (no) | 1988-06-27 | 1988-06-27 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0210006U true JPH0210006U (no) | 1990-01-23 |
Family
ID=31309336
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8465588U Pending JPH0210006U (no) | 1988-06-27 | 1988-06-27 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0210006U (no) |
-
1988
- 1988-06-27 JP JP8465588U patent/JPH0210006U/ja active Pending
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