JPH0198159U - - Google Patents

Info

Publication number
JPH0198159U
JPH0198159U JP19211887U JP19211887U JPH0198159U JP H0198159 U JPH0198159 U JP H0198159U JP 19211887 U JP19211887 U JP 19211887U JP 19211887 U JP19211887 U JP 19211887U JP H0198159 U JPH0198159 U JP H0198159U
Authority
JP
Japan
Prior art keywords
comes
vacuum
groove
sputtering
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19211887U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19211887U priority Critical patent/JPH0198159U/ja
Publication of JPH0198159U publication Critical patent/JPH0198159U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP19211887U 1987-12-18 1987-12-18 Pending JPH0198159U (xx)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19211887U JPH0198159U (xx) 1987-12-18 1987-12-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19211887U JPH0198159U (xx) 1987-12-18 1987-12-18

Publications (1)

Publication Number Publication Date
JPH0198159U true JPH0198159U (xx) 1989-06-30

Family

ID=31482991

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19211887U Pending JPH0198159U (xx) 1987-12-18 1987-12-18

Country Status (1)

Country Link
JP (1) JPH0198159U (xx)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006503984A (ja) * 2002-10-24 2006-02-02 ハネウエル・インターナシヨナル・インコーポレーテツド 冷却能を向上させると共に撓みおよび変形を減少させるターゲットの設計およびその関連方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006503984A (ja) * 2002-10-24 2006-02-02 ハネウエル・インターナシヨナル・インコーポレーテツド 冷却能を向上させると共に撓みおよび変形を減少させるターゲットの設計およびその関連方法
JP2011052325A (ja) * 2002-10-24 2011-03-17 Honeywell Internatl Inc 冷却能を向上させると共に撓みおよび変形を減少させるターゲットの設計およびその関連方法
JP2014051746A (ja) * 2002-10-24 2014-03-20 Honeywell Internatl Inc 冷却能を向上させると共に撓みおよび変形を減少させるターゲットの設計およびその関連方法

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