JPS63154661U - - Google Patents
Info
- Publication number
- JPS63154661U JPS63154661U JP4534587U JP4534587U JPS63154661U JP S63154661 U JPS63154661 U JP S63154661U JP 4534587 U JP4534587 U JP 4534587U JP 4534587 U JP4534587 U JP 4534587U JP S63154661 U JPS63154661 U JP S63154661U
- Authority
- JP
- Japan
- Prior art keywords
- sputtering
- metal
- back plate
- screwed
- comes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005477 sputtering target Methods 0.000 claims description 3
- 239000013077 target material Substances 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims 2
- 238000001816 cooling Methods 0.000 claims 1
- 238000004544 sputter deposition Methods 0.000 claims 1
- 229910000906 Bronze Inorganic materials 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000010974 bronze Substances 0.000 description 1
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4534587U JPS63154661U (xx) | 1987-03-26 | 1987-03-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4534587U JPS63154661U (xx) | 1987-03-26 | 1987-03-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63154661U true JPS63154661U (xx) | 1988-10-11 |
Family
ID=30863998
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4534587U Pending JPS63154661U (xx) | 1987-03-26 | 1987-03-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63154661U (xx) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0432565A (ja) * | 1990-05-29 | 1992-02-04 | Tokuda Seisakusho Ltd | スパッタリング装置におけるターゲットの固定方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59179784A (ja) * | 1983-03-31 | 1984-10-12 | Fujitsu Ltd | スパツタ装置 |
-
1987
- 1987-03-26 JP JP4534587U patent/JPS63154661U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59179784A (ja) * | 1983-03-31 | 1984-10-12 | Fujitsu Ltd | スパツタ装置 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0432565A (ja) * | 1990-05-29 | 1992-02-04 | Tokuda Seisakusho Ltd | スパッタリング装置におけるターゲットの固定方法 |