JPS63135964U - - Google Patents
Info
- Publication number
- JPS63135964U JPS63135964U JP2624487U JP2624487U JPS63135964U JP S63135964 U JPS63135964 U JP S63135964U JP 2624487 U JP2624487 U JP 2624487U JP 2624487 U JP2624487 U JP 2624487U JP S63135964 U JPS63135964 U JP S63135964U
- Authority
- JP
- Japan
- Prior art keywords
- refrigerant
- back surface
- corrosion
- resistant film
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000003507 refrigerant Substances 0.000 claims description 3
- 230000007797 corrosion Effects 0.000 claims description 2
- 238000005260 corrosion Methods 0.000 claims description 2
- 238000005477 sputtering target Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2624487U JPS63135964U (xx) | 1987-02-24 | 1987-02-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2624487U JPS63135964U (xx) | 1987-02-24 | 1987-02-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63135964U true JPS63135964U (xx) | 1988-09-07 |
Family
ID=30827145
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2624487U Pending JPS63135964U (xx) | 1987-02-24 | 1987-02-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63135964U (xx) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006503984A (ja) * | 2002-10-24 | 2006-02-02 | ハネウエル・インターナシヨナル・インコーポレーテツド | 冷却能を向上させると共に撓みおよび変形を減少させるターゲットの設計およびその関連方法 |
-
1987
- 1987-02-24 JP JP2624487U patent/JPS63135964U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006503984A (ja) * | 2002-10-24 | 2006-02-02 | ハネウエル・インターナシヨナル・インコーポレーテツド | 冷却能を向上させると共に撓みおよび変形を減少させるターゲットの設計およびその関連方法 |
| JP2011052325A (ja) * | 2002-10-24 | 2011-03-17 | Honeywell Internatl Inc | 冷却能を向上させると共に撓みおよび変形を減少させるターゲットの設計およびその関連方法 |
| JP2014051746A (ja) * | 2002-10-24 | 2014-03-20 | Honeywell Internatl Inc | 冷却能を向上させると共に撓みおよび変形を減少させるターゲットの設計およびその関連方法 |