JPH0196646U - - Google Patents
Info
- Publication number
- JPH0196646U JPH0196646U JP19419087U JP19419087U JPH0196646U JP H0196646 U JPH0196646 U JP H0196646U JP 19419087 U JP19419087 U JP 19419087U JP 19419087 U JP19419087 U JP 19419087U JP H0196646 U JPH0196646 U JP H0196646U
- Authority
- JP
- Japan
- Prior art keywords
- abnormal phenomenon
- ion implanter
- data file
- error code
- storing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 claims description 3
- 230000002159 abnormal effect Effects 0.000 claims 11
- 238000003745 diagnosis Methods 0.000 claims 2
- 238000005468 ion implantation Methods 0.000 claims 2
- 238000011084 recovery Methods 0.000 claims 2
- 230000005856 abnormality Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19419087U JPH0196646U (enExample) | 1987-12-21 | 1987-12-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19419087U JPH0196646U (enExample) | 1987-12-21 | 1987-12-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0196646U true JPH0196646U (enExample) | 1989-06-27 |
Family
ID=31484931
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19419087U Pending JPH0196646U (enExample) | 1987-12-21 | 1987-12-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0196646U (enExample) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61206149A (ja) * | 1985-03-08 | 1986-09-12 | Hitachi Ltd | イオン打込装置 |
-
1987
- 1987-12-21 JP JP19419087U patent/JPH0196646U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61206149A (ja) * | 1985-03-08 | 1986-09-12 | Hitachi Ltd | イオン打込装置 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS61285569A (ja) | マルチコンピユ−タシステムにおけるプログラム管理方法 | |
| JPH0196646U (enExample) | ||
| JPS6312093A (ja) | 発電プラントの異常診断装置 | |
| KR100580103B1 (ko) | 통신망관리시스템의 서버프로세스 원격감시 방법 | |
| JPS62213459A (ja) | 入力制御方式 | |
| JPH02310138A (ja) | 車載用電子装置の故障診断システム | |
| JPS61156696U (enExample) | ||
| JPH05241811A (ja) | 対話評価装置 | |
| JP2557127B2 (ja) | 伝送端末装置 | |
| JPS5869161A (ja) | フアクシミリ通信システム | |
| JPH044603B2 (enExample) | ||
| JPH01159744A (ja) | 障害情報表示方式 | |
| JPH03293524A (ja) | プラント異常診断装置 | |
| JPS63131739A (ja) | 電文復旧処理方式 | |
| JPH05304795A (ja) | サーボモータ制御装置 | |
| JPS6314542B2 (enExample) | ||
| JPH06326752A (ja) | 通信プロトコル故障解析方法および装置 | |
| JP2530410Y2 (ja) | 車両用故障診断装置 | |
| JPS5819305U (ja) | 異常状態表示装置 | |
| JPH0593505A (ja) | ボイラの異常原因診断装置 | |
| JPS5850779U (ja) | 遠方監視制御装置の制御不一致検出方式 | |
| JPS61228552A (ja) | ポ−リング方式 | |
| JPS6380347A (ja) | フアイル転送の再送方式 | |
| ARMSTRONG et al. | ATEC digital adaptation study. Volume 3: Summary and recommendations[Final Technical Report, 27 Jun. 1975- 29 Feb. 1976] | |
| JPS63257054A (ja) | 故障診断方式 |