JPH0196646U - - Google Patents
Info
- Publication number
- JPH0196646U JPH0196646U JP19419087U JP19419087U JPH0196646U JP H0196646 U JPH0196646 U JP H0196646U JP 19419087 U JP19419087 U JP 19419087U JP 19419087 U JP19419087 U JP 19419087U JP H0196646 U JPH0196646 U JP H0196646U
- Authority
- JP
- Japan
- Prior art keywords
- abnormal phenomenon
- ion implanter
- data file
- error code
- storing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 claims description 3
- 230000002159 abnormal effect Effects 0.000 claims 11
- 238000003745 diagnosis Methods 0.000 claims 2
- 238000005468 ion implantation Methods 0.000 claims 2
- 238000011084 recovery Methods 0.000 claims 2
- 230000005856 abnormality Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Description
第１図はこの考案の一実施例の構成を示すブロ
ツク図、第２図は同じくハードウエア構成を示す
ブロツク図、第３図はイオン注入装置の動作を示
すフローチヤート、第４図は推論の方法を概略図
である。
１……要求手段、２……受信手段、３……第１
の記憶手段、４……第２の記憶手段、５……推論
手段、６……表示手段。
Fig. 1 is a block diagram showing the configuration of an embodiment of this invention, Fig. 2 is a block diagram also showing the hardware configuration, Fig. 3 is a flowchart showing the operation of the ion implanter, and Fig. 4 is a diagram showing the inference. FIG. 2 is a schematic illustration of the method. 1...Requesting means, 2...Receiving means, 3...First
storage means, 4...second storage means, 5...inference means, 6...display means.
Claims (1)
値を異常現象発生時データフアイルとして記憶保
持するとともに異常現象の種類を示すエラーコー
ドを記憶保持しかつ異常現象発生を示すメツセー
ジを表示するイオン注入装置に対してケーブルで
接続され、前記イオン注入装置との間で各種信号
の受け渡しを行うイオン注入装置用故障診断装置
であつて、 前記イオン注入装置の異常発生時に前記イオン
注入装置に対してエラーコードおよび異常現象発
生時データフアイルを要求する要求手段と、前記
イオン注入装置から送信されるエラーコードおよ
び異常現象発生時データフアイルを受信する受信
手段と、この受信手段により受信したエラーコー
ドおよび異常現象発生時データフアイルを記憶す
る第１の記憶手段と、前記イオン注入装置の故障
原因およびその復旧方法と異常現象の種類を示す
エラーコードおよび異常現象発生時における各部
の運転パラメータ値との関係を示す知識データベ
ースを記憶した第２の記憶手段と、前記第２の記
憶手段に記憶した知識データベースを元にして前
記第１の記憶手段に記憶されたエラーコードおよ
び異常現象発生時データフアイル中の異常現象発
生時における各部の運転パラメータ値から故障原
因およびその復旧方法を推定する推論手段と、こ
の推論手段の推定結果を表示する表示手段とを備
えたイオン注入装置用故障診断装置。[Scope of Claim for Utility Model Registration] Storing and retaining the operating parameter values of each part when an abnormal phenomenon occurs as an abnormal phenomenon occurrence data file, storing and retaining an error code indicating the type of abnormal phenomenon, and sending a message indicating the occurrence of the abnormal phenomenon. A failure diagnosis device for an ion implanter that is connected to an ion implanter to be displayed by a cable and exchanges various signals with the ion implanter, the ion implanter being displayed when an abnormality occurs in the ion implanter. a requesting means for requesting an error code and a data file at the time of abnormal phenomenon occurrence from the ion implanter; a receiving means for receiving the error code and the data file at the time of abnormal phenomenon occurrence transmitted from the ion implantation apparatus; and an error received by the receiving means. a first storage means for storing a code and a data file when an abnormal phenomenon occurs; an error code indicating the cause of failure of the ion implantation device, a recovery method thereof, and a type of abnormal phenomenon; and operating parameter values of each part when an abnormal phenomenon occurs; a second storage means storing a knowledge database showing the relationship between the above, and an error code and abnormal phenomenon occurrence data file stored in the first storage means based on the knowledge database stored in the second storage means. A failure diagnosis device for an ion implanter, comprising an inference means for estimating the cause of failure and a recovery method from the operating parameter values of each part when an abnormal phenomenon occurs in the ion implanter, and a display means for displaying the estimation result of the inference means.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19419087U JPH0196646U (en) | 1987-12-21 | 1987-12-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19419087U JPH0196646U (en) | 1987-12-21 | 1987-12-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0196646U true JPH0196646U (en) | 1989-06-27 |
Family
ID=31484931
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19419087U Pending JPH0196646U (en) | 1987-12-21 | 1987-12-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0196646U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61206149A (en) * | 1985-03-08 | 1986-09-12 | Hitachi Ltd | Ion implanting apparatus |
-
1987
- 1987-12-21 JP JP19419087U patent/JPH0196646U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61206149A (en) * | 1985-03-08 | 1986-09-12 | Hitachi Ltd | Ion implanting apparatus |
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