JPS61206149A - Ion implanting apparatus - Google Patents

Abstract

PURPOSE:To comprehend the condition of ion implanting apparatus, the information of implanted specimen and the record by temporarily storing the error information in the ion implanter and outputting when required or upon finish of implantation. CONSTITUTION:Upon occurrence of error during implantation or monitoring through an ion implanter 1 and a controller 2, said error information is fed to a computer 3. The computer 3 will store the error code corresponding with the error information and the information of year, month, date, o'clock and minute fed from a timing device 5 into a memory 4. At the sametime, the computer 3 will collect other informations necessary for automatic resetting to decide whether it is resetable automatically. When it is resetable automatically, implantation or monitoring is performed while storing the error code and the day and o'clock in the memory 4 and to take out the informations stored in the memory 4 through an external output device 6 randomly or upon finish of implantation.

Description

[Detailed Description of the Invention] [Field of Application of the Invention] The present invention relates to an ion implantation device, and in particular to information suitable for providing error information associated with automation of the implantation device and information on processed samples. Regarding collection.

[Background of the invention]

Conventional error alarms and displays in ion implantation equipment display an error code when an error occurs, issue an alarm, and stop the implantation process of the ion implantation equipment, but automation of ion implantation equipment Due to this, there is a drawback that when automatic recovery processing is performed by gluing trial, such as resetting when an error is detected, there is no error information during the implantation process, and error information and history for processed samples are not left. .

[Purpose of the invention]

An object of the present invention is to temporarily store error information in the ion implantation device and output the information when necessary or at the end of the implantation process, thereby understanding the state of the ion implantation device and improving the implantation process. The purpose of this website is to provide information on processed samples, their provenance, etc.

[Summary of the invention]

The present invention includes a timing function in the ion implantation and direct control part,
By effectively utilizing this function, when an error occurs in the driving device,
Temporarily memorize the date and time and error code, automatically recover from the error state, output this information arbitrarily, obtain information and history of the implanted sample, and grasp the status of the ion implantation device. This is what made it possible.

[Embodiments of the invention]

The ion implantation device f1ri is controlled by the control device 2,
A computer 3, a storage device 4, a clock device 5, and an external output device 6 are connected to this control device 2.
t2 monitors the ion beam extraction conditions and the state of the ion implantation device.

If an error occurs in the ion implantation device 1 and the control device 2 during implantation processing or during status monitoring, the error information is sent to the computer 3. Calculator 3 receives the error code based on the error information and the year, month, day, and time from clock f5.
Hour and minute information is stored in the storage device 4. calculator 3 at the same time
collects the information necessary for automatic recovery from the error information, determines whether automatic recovery is possible, and performs processing.

When automatic recovery is possible, the error code and date and time information are stored in the storage device 4, input processing or status monitoring is performed, and when the input processing is completed or optionally the external output device f6 is output. , outputs the information stored in the storage device fi4.

If automatic recovery is not possible, a warning is issued and an error code is output, and the system waits for the operator to take action. The output format door is one row of them.

FIG. 2 shows the above flowchart.

According to an embodiment of the present invention, it is possible to grasp the error information and history of the ion implantation device for a sample that has been implanted, thereby improving the reliability of ion implantation device condition diagnosis and sample production management. There are other effects.

〔Effect of the invention〕

According to the present invention, since information on the error code and date and time at the time of error occurrence can be obtained, it is effective in improving the reliability of the sample and the reliability of the apparatus.

[Brief explanation of the drawing]

FIG. 1 is a route diagram illustrating the operating principle of the present invention, and FIG. 2 is a flowchart illustrating one working principle of the present invention.

Claims (1)

[Claims] 1. An ion source that can ionize and accelerate a sample, a mass separation electromagnet that can select any ion, a deflection electromagnet that deflects the mass-separated ions, and a plurality of samples are attached and rotated. In an ion implantation device consisting of multiple implantation chambers with built-in discs, the control unit is equipped with a computer, memory function, and timekeeping function, and the ion implantation device is automatically reset based on error information of the ion implantation device. An ion implantation apparatus characterized in that the state of the ion implantation apparatus and process failures are diagnosed by storing and arbitrarily outputting date and time information and error information. 2. In claim 1, each time the sample placement process is completed, error information and date and time information that occurred during the sample placement time are outputted, and are used as history information of the sample that has been placed, and during the placement process. An ion implantation device characterized in that the analysis information on the cause of failure of the ion implanter is provided. 3. Ion implantation according to claim 1, characterized in that when automatic recovery is impossible due to error information of the ion implantation device, a display and an alarm are issued without storing error information and date/time information. Device.