JPH0196287U - - Google Patents

Info

Publication number
JPH0196287U
JPH0196287U JP19318787U JP19318787U JPH0196287U JP H0196287 U JPH0196287 U JP H0196287U JP 19318787 U JP19318787 U JP 19318787U JP 19318787 U JP19318787 U JP 19318787U JP H0196287 U JPH0196287 U JP H0196287U
Authority
JP
Japan
Prior art keywords
recess
processing machine
base plate
holding device
laser processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19318787U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0530870Y2 (US20080094685A1-20080424-C00004.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19318787U priority Critical patent/JPH0530870Y2/ja
Publication of JPH0196287U publication Critical patent/JPH0196287U/ja
Application granted granted Critical
Publication of JPH0530870Y2 publication Critical patent/JPH0530870Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
JP19318787U 1987-12-18 1987-12-18 Expired - Lifetime JPH0530870Y2 (US20080094685A1-20080424-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19318787U JPH0530870Y2 (US20080094685A1-20080424-C00004.png) 1987-12-18 1987-12-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19318787U JPH0530870Y2 (US20080094685A1-20080424-C00004.png) 1987-12-18 1987-12-18

Publications (2)

Publication Number Publication Date
JPH0196287U true JPH0196287U (US20080094685A1-20080424-C00004.png) 1989-06-26
JPH0530870Y2 JPH0530870Y2 (US20080094685A1-20080424-C00004.png) 1993-08-06

Family

ID=31699846

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19318787U Expired - Lifetime JPH0530870Y2 (US20080094685A1-20080424-C00004.png) 1987-12-18 1987-12-18

Country Status (1)

Country Link
JP (1) JPH0530870Y2 (US20080094685A1-20080424-C00004.png)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08309566A (ja) * 1995-05-19 1996-11-26 Nec Corp ビアホール形成方法及びレーザ光照射装置
JP2009188303A (ja) * 2008-02-08 2009-08-20 Lintec Corp レーザーダイシングシートおよびチップ体の製造方法
JP2009183997A (ja) * 2008-02-08 2009-08-20 Lintec Corp ワークの支持体および該支持体を用いたワークの加工方法
JP2011119419A (ja) * 2009-12-03 2011-06-16 Sumitomo Heavy Ind Ltd レーザ処理装置及びレーザ処理方法
JP2015018974A (ja) * 2013-07-11 2015-01-29 東京応化工業株式会社 支持体分離装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08309566A (ja) * 1995-05-19 1996-11-26 Nec Corp ビアホール形成方法及びレーザ光照射装置
JP2009188303A (ja) * 2008-02-08 2009-08-20 Lintec Corp レーザーダイシングシートおよびチップ体の製造方法
JP2009183997A (ja) * 2008-02-08 2009-08-20 Lintec Corp ワークの支持体および該支持体を用いたワークの加工方法
JP2011119419A (ja) * 2009-12-03 2011-06-16 Sumitomo Heavy Ind Ltd レーザ処理装置及びレーザ処理方法
JP2015018974A (ja) * 2013-07-11 2015-01-29 東京応化工業株式会社 支持体分離装置

Also Published As

Publication number Publication date
JPH0530870Y2 (US20080094685A1-20080424-C00004.png) 1993-08-06

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