JPH0193976U - - Google Patents

Info

Publication number
JPH0193976U
JPH0193976U JP18993287U JP18993287U JPH0193976U JP H0193976 U JPH0193976 U JP H0193976U JP 18993287 U JP18993287 U JP 18993287U JP 18993287 U JP18993287 U JP 18993287U JP H0193976 U JPH0193976 U JP H0193976U
Authority
JP
Japan
Prior art keywords
positioning table
coil
power supply
movable mechanism
attached
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18993287U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18993287U priority Critical patent/JPH0193976U/ja
Publication of JPH0193976U publication Critical patent/JPH0193976U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Machine Tool Units (AREA)
  • Reciprocating, Oscillating Or Vibrating Motors (AREA)
JP18993287U 1987-12-16 1987-12-16 Pending JPH0193976U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18993287U JPH0193976U (enExample) 1987-12-16 1987-12-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18993287U JPH0193976U (enExample) 1987-12-16 1987-12-16

Publications (1)

Publication Number Publication Date
JPH0193976U true JPH0193976U (enExample) 1989-06-21

Family

ID=31480940

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18993287U Pending JPH0193976U (enExample) 1987-12-16 1987-12-16

Country Status (1)

Country Link
JP (1) JPH0193976U (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05237787A (ja) * 1992-02-13 1993-09-17 Nec Corp ２次元位置決めステージ
WO1996028276A1 (en) * 1995-03-14 1996-09-19 Fanuc Ltd Biaxial table apparatus driven by linear motor
JP2010500928A (ja) * 2006-08-17 2010-01-14 シーメンス アクチエンゲゼルシヤフト リニアモータ組込み形機器搬送台車

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05237787A (ja) * 1992-02-13 1993-09-17 Nec Corp ２次元位置決めステージ
WO1996028276A1 (en) * 1995-03-14 1996-09-19 Fanuc Ltd Biaxial table apparatus driven by linear motor
JP2010500928A (ja) * 2006-08-17 2010-01-14 シーメンス アクチエンゲゼルシヤフト リニアモータ組込み形機器搬送台車

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