JPH0192131U - - Google Patents
Info
- Publication number
- JPH0192131U JPH0192131U JP18693187U JP18693187U JPH0192131U JP H0192131 U JPH0192131 U JP H0192131U JP 18693187 U JP18693187 U JP 18693187U JP 18693187 U JP18693187 U JP 18693187U JP H0192131 U JPH0192131 U JP H0192131U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- photoresist
- wafer
- nozzle
- coating apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002904 solvent Substances 0.000 claims description 3
- 229920002120 photoresistant polymer Polymers 0.000 claims 4
- 239000004065 semiconductor Substances 0.000 claims 4
- 239000011248 coating agent Substances 0.000 claims 2
- 238000000576 coating method Methods 0.000 claims 2
- 238000007599 discharging Methods 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18693187U JPH0192131U (ru) | 1987-12-08 | 1987-12-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18693187U JPH0192131U (ru) | 1987-12-08 | 1987-12-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0192131U true JPH0192131U (ru) | 1989-06-16 |
Family
ID=31478126
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18693187U Pending JPH0192131U (ru) | 1987-12-08 | 1987-12-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0192131U (ru) |
-
1987
- 1987-12-08 JP JP18693187U patent/JPH0192131U/ja active Pending