JPS63167728U - - Google Patents
Info
- Publication number
- JPS63167728U JPS63167728U JP6032987U JP6032987U JPS63167728U JP S63167728 U JPS63167728 U JP S63167728U JP 6032987 U JP6032987 U JP 6032987U JP 6032987 U JP6032987 U JP 6032987U JP S63167728 U JPS63167728 U JP S63167728U
- Authority
- JP
- Japan
- Prior art keywords
- resist
- nozzle
- coating device
- chuck
- tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011248 coating agent Substances 0.000 claims description 4
- 238000000576 coating method Methods 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6032987U JPS63167728U (ru) | 1987-04-21 | 1987-04-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6032987U JPS63167728U (ru) | 1987-04-21 | 1987-04-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63167728U true JPS63167728U (ru) | 1988-11-01 |
Family
ID=30892648
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6032987U Pending JPS63167728U (ru) | 1987-04-21 | 1987-04-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63167728U (ru) |
-
1987
- 1987-04-21 JP JP6032987U patent/JPS63167728U/ja active Pending