JPS63159823U - - Google Patents
Info
- Publication number
- JPS63159823U JPS63159823U JP5283587U JP5283587U JPS63159823U JP S63159823 U JPS63159823 U JP S63159823U JP 5283587 U JP5283587 U JP 5283587U JP 5283587 U JP5283587 U JP 5283587U JP S63159823 U JPS63159823 U JP S63159823U
- Authority
- JP
- Japan
- Prior art keywords
- drain
- wafer
- organic solvent
- drain cup
- resist coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011248 coating agent Substances 0.000 claims description 4
- 238000000576 coating method Methods 0.000 claims description 4
- 239000003960 organic solvent Substances 0.000 claims description 3
- 238000007599 discharging Methods 0.000 claims 1
- 229920002120 photoresistant polymer Polymers 0.000 claims 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5283587U JPS63159823U (ru) | 1987-04-06 | 1987-04-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5283587U JPS63159823U (ru) | 1987-04-06 | 1987-04-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63159823U true JPS63159823U (ru) | 1988-10-19 |
Family
ID=30878361
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5283587U Pending JPS63159823U (ru) | 1987-04-06 | 1987-04-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63159823U (ru) |
-
1987
- 1987-04-06 JP JP5283587U patent/JPS63159823U/ja active Pending