JPH019172Y2 - - Google Patents

Info

Publication number
JPH019172Y2
JPH019172Y2 JP1985080723U JP8072385U JPH019172Y2 JP H019172 Y2 JPH019172 Y2 JP H019172Y2 JP 1985080723 U JP1985080723 U JP 1985080723U JP 8072385 U JP8072385 U JP 8072385U JP H019172 Y2 JPH019172 Y2 JP H019172Y2
Authority
JP
Japan
Prior art keywords
semiconductor wafer
filtration filter
storage container
molecular filtration
wafer storage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985080723U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61196536U (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985080723U priority Critical patent/JPH019172Y2/ja
Publication of JPS61196536U publication Critical patent/JPS61196536U/ja
Application granted granted Critical
Publication of JPH019172Y2 publication Critical patent/JPH019172Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Details Of Rigid Or Semi-Rigid Containers (AREA)
  • Packaging Frangible Articles (AREA)
JP1985080723U 1985-05-29 1985-05-29 Expired JPH019172Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985080723U JPH019172Y2 (enExample) 1985-05-29 1985-05-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985080723U JPH019172Y2 (enExample) 1985-05-29 1985-05-29

Publications (2)

Publication Number Publication Date
JPS61196536U JPS61196536U (enExample) 1986-12-08
JPH019172Y2 true JPH019172Y2 (enExample) 1989-03-13

Family

ID=30626846

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985080723U Expired JPH019172Y2 (enExample) 1985-05-29 1985-05-29

Country Status (1)

Country Link
JP (1) JPH019172Y2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5873468A (en) * 1995-11-16 1999-02-23 Sumitomo Sitix Corporation Thin-plate supporting container with filter means

Also Published As

Publication number Publication date
JPS61196536U (enExample) 1986-12-08

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