JPS61196536U - - Google Patents
Info
- Publication number
- JPS61196536U JPS61196536U JP1985080723U JP8072385U JPS61196536U JP S61196536 U JPS61196536 U JP S61196536U JP 1985080723 U JP1985080723 U JP 1985080723U JP 8072385 U JP8072385 U JP 8072385U JP S61196536 U JPS61196536 U JP S61196536U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- storage container
- filtration filter
- molecular filtration
- wafer storage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Details Of Rigid Or Semi-Rigid Containers (AREA)
- Packaging Frangible Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985080723U JPH019172Y2 (enExample) | 1985-05-29 | 1985-05-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985080723U JPH019172Y2 (enExample) | 1985-05-29 | 1985-05-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61196536U true JPS61196536U (enExample) | 1986-12-08 |
| JPH019172Y2 JPH019172Y2 (enExample) | 1989-03-13 |
Family
ID=30626846
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985080723U Expired JPH019172Y2 (enExample) | 1985-05-29 | 1985-05-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH019172Y2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6032802A (en) * | 1995-11-16 | 2000-03-07 | Sumitomo Metal Industries, Ltd. | Thin-plate supporting container with filter means |
-
1985
- 1985-05-29 JP JP1985080723U patent/JPH019172Y2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6032802A (en) * | 1995-11-16 | 2000-03-07 | Sumitomo Metal Industries, Ltd. | Thin-plate supporting container with filter means |
| US6105781A (en) * | 1995-11-16 | 2000-08-22 | Sumitomo Metal Industries, Ltd. | Thin-plate supporting container with unitary porous gasket |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH019172Y2 (enExample) | 1989-03-13 |