JPH0189731U - - Google Patents

Info

Publication number
JPH0189731U
JPH0189731U JP18508687U JP18508687U JPH0189731U JP H0189731 U JPH0189731 U JP H0189731U JP 18508687 U JP18508687 U JP 18508687U JP 18508687 U JP18508687 U JP 18508687U JP H0189731 U JPH0189731 U JP H0189731U
Authority
JP
Japan
Prior art keywords
transfer device
wafer boat
boat transfer
hawk
heating tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18508687U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18508687U priority Critical patent/JPH0189731U/ja
Publication of JPH0189731U publication Critical patent/JPH0189731U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Description

【図面の簡単な説明】
第1図、第2図は、この考案の実施例を示す図
で、第1図は正面図、第2図は第1図の―線
断面図、第3図は従来例を示す縦断面図、第4図
は従来例における石英管内の長手方向の温度分布
を示す図である。 10……ホーク、15……加熱管。

Claims (1)

  1. 【実用新案登録請求の範囲】 (1) ホークに加熱手段を設けたことを特徴とす
    るウエハボートの搬送装置。 (2) 前記加熱手段が、加熱管であることを特徴
    とする実用新案登録請求の範囲第1項記載のウエ
    ハボートの搬送装置。 (3) 前記加熱管が、ホークの底部溝に設けられ
    ていることを特徴とする実用新案登録請求の範囲
    第2項記載のウエハボートの搬送装置。
JP18508687U 1987-12-04 1987-12-04 Pending JPH0189731U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18508687U JPH0189731U (ja) 1987-12-04 1987-12-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18508687U JPH0189731U (ja) 1987-12-04 1987-12-04

Publications (1)

Publication Number Publication Date
JPH0189731U true JPH0189731U (ja) 1989-06-13

Family

ID=31476415

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18508687U Pending JPH0189731U (ja) 1987-12-04 1987-12-04

Country Status (1)

Country Link
JP (1) JPH0189731U (ja)

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