JPH0187205U - - Google Patents
Info
- Publication number
- JPH0187205U JPH0187205U JP18391287U JP18391287U JPH0187205U JP H0187205 U JPH0187205 U JP H0187205U JP 18391287 U JP18391287 U JP 18391287U JP 18391287 U JP18391287 U JP 18391287U JP H0187205 U JPH0187205 U JP H0187205U
- Authority
- JP
- Japan
- Prior art keywords
- ultrasonic sensor
- film thickness
- oscillating part
- substrate
- ultrasonic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 4
- 230000003595 spectral effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000001228 spectrum Methods 0.000 description 2
- 239000012528 membrane Substances 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
Landscapes
- Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18391287U JPH0187205U (ko) | 1987-12-02 | 1987-12-02 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18391287U JPH0187205U (ko) | 1987-12-02 | 1987-12-02 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0187205U true JPH0187205U (ko) | 1989-06-08 |
Family
ID=31475312
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18391287U Pending JPH0187205U (ko) | 1987-12-02 | 1987-12-02 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0187205U (ko) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04315909A (ja) * | 1991-04-15 | 1992-11-06 | Toppan Printing Co Ltd | 層厚測定方法 |
JP2020153810A (ja) * | 2019-03-20 | 2020-09-24 | 三菱電機株式会社 | 液体検知方法および液体検知装置 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4835883A (ko) * | 1971-09-09 | 1973-05-26 | ||
JPS6120803A (ja) * | 1984-07-10 | 1986-01-29 | Toppan Printing Co Ltd | 膜厚測定方法 |
-
1987
- 1987-12-02 JP JP18391287U patent/JPH0187205U/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4835883A (ko) * | 1971-09-09 | 1973-05-26 | ||
JPS6120803A (ja) * | 1984-07-10 | 1986-01-29 | Toppan Printing Co Ltd | 膜厚測定方法 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04315909A (ja) * | 1991-04-15 | 1992-11-06 | Toppan Printing Co Ltd | 層厚測定方法 |
JP2020153810A (ja) * | 2019-03-20 | 2020-09-24 | 三菱電機株式会社 | 液体検知方法および液体検知装置 |
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