JPH0186233U - - Google Patents
Info
- Publication number
- JPH0186233U JPH0186233U JP18166887U JP18166887U JPH0186233U JP H0186233 U JPH0186233 U JP H0186233U JP 18166887 U JP18166887 U JP 18166887U JP 18166887 U JP18166887 U JP 18166887U JP H0186233 U JPH0186233 U JP H0186233U
- Authority
- JP
- Japan
- Prior art keywords
- spin chuck
- substrate
- ozone
- cleaning device
- dry cleaning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 11
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 claims description 9
- 238000005108 dry cleaning Methods 0.000 claims description 4
- 239000010453 quartz Substances 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- 238000009792 diffusion process Methods 0.000 claims 1
- 239000005416 organic matter Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Cleaning In General (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987181668U JPH0610678Y2 (ja) | 1987-11-28 | 1987-11-28 | 基板の乾式洗浄装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987181668U JPH0610678Y2 (ja) | 1987-11-28 | 1987-11-28 | 基板の乾式洗浄装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0186233U true JPH0186233U (cs) | 1989-06-07 |
| JPH0610678Y2 JPH0610678Y2 (ja) | 1994-03-16 |
Family
ID=31473146
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987181668U Expired - Lifetime JPH0610678Y2 (ja) | 1987-11-28 | 1987-11-28 | 基板の乾式洗浄装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0610678Y2 (cs) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61194830A (ja) * | 1985-02-25 | 1986-08-29 | Dainippon Screen Mfg Co Ltd | 基板の有機物除去装置 |
-
1987
- 1987-11-28 JP JP1987181668U patent/JPH0610678Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61194830A (ja) * | 1985-02-25 | 1986-08-29 | Dainippon Screen Mfg Co Ltd | 基板の有機物除去装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0610678Y2 (ja) | 1994-03-16 |
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