JPH0186054U - - Google Patents
Info
- Publication number
- JPH0186054U JPH0186054U JP18065487U JP18065487U JPH0186054U JP H0186054 U JPH0186054 U JP H0186054U JP 18065487 U JP18065487 U JP 18065487U JP 18065487 U JP18065487 U JP 18065487U JP H0186054 U JPH0186054 U JP H0186054U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum chamber
- cathode
- electron microscope
- vacuum
- evaporation device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 4
- 229910052760 oxygen Inorganic materials 0.000 claims description 4
- 239000001301 oxygen Substances 0.000 claims description 4
- 238000007738 vacuum evaporation Methods 0.000 claims description 3
- 238000004380 ashing Methods 0.000 claims 1
- 238000010000 carbonizing Methods 0.000 claims 1
- 150000002500 ions Chemical class 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 239000005416 organic matter Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18065487U JPH0186054U (zh) | 1987-11-26 | 1987-11-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18065487U JPH0186054U (zh) | 1987-11-26 | 1987-11-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0186054U true JPH0186054U (zh) | 1989-06-07 |
Family
ID=31472164
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18065487U Pending JPH0186054U (zh) | 1987-11-26 | 1987-11-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0186054U (zh) |
-
1987
- 1987-11-26 JP JP18065487U patent/JPH0186054U/ja active Pending
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