JPH0183969U - - Google Patents
Info
- Publication number
- JPH0183969U JPH0183969U JP1987179564U JP17956487U JPH0183969U JP H0183969 U JPH0183969 U JP H0183969U JP 1987179564 U JP1987179564 U JP 1987179564U JP 17956487 U JP17956487 U JP 17956487U JP H0183969 U JPH0183969 U JP H0183969U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- auxiliary
- main
- flange
- gasket
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 description 2
- 238000010998 test method Methods 0.000 description 1
Landscapes
- Flanged Joints, Insulating Joints, And Other Joints (AREA)
- Gasket Seals (AREA)
- Sealing Devices (AREA)
- Pressure Vessels And Lids Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987179564U JPH0183969U (ko) | 1987-11-27 | 1987-11-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987179564U JPH0183969U (ko) | 1987-11-27 | 1987-11-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0183969U true JPH0183969U (ko) | 1989-06-05 |
Family
ID=31471111
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987179564U Pending JPH0183969U (ko) | 1987-11-27 | 1987-11-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0183969U (ko) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0534357U (ja) * | 1991-09-03 | 1993-05-07 | 石川島播磨重工業株式会社 | 容器等におけるフランジ部のシール構造 |
| JP2005325973A (ja) * | 2004-05-17 | 2005-11-24 | Sigma Meltec Ltd | 処理チャンバ装置のシール構造 |
-
1987
- 1987-11-27 JP JP1987179564U patent/JPH0183969U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0534357U (ja) * | 1991-09-03 | 1993-05-07 | 石川島播磨重工業株式会社 | 容器等におけるフランジ部のシール構造 |
| JP2005325973A (ja) * | 2004-05-17 | 2005-11-24 | Sigma Meltec Ltd | 処理チャンバ装置のシール構造 |