JPH0183969U - - Google Patents
Info
- Publication number
- JPH0183969U JPH0183969U JP1987179564U JP17956487U JPH0183969U JP H0183969 U JPH0183969 U JP H0183969U JP 1987179564 U JP1987179564 U JP 1987179564U JP 17956487 U JP17956487 U JP 17956487U JP H0183969 U JPH0183969 U JP H0183969U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- auxiliary
- main
- flange
- gasket
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 description 2
- 238000010998 test method Methods 0.000 description 1
Landscapes
- Flanged Joints, Insulating Joints, And Other Joints (AREA)
- Gasket Seals (AREA)
- Sealing Devices (AREA)
- Pressure Vessels And Lids Thereof (AREA)
Description
第１図は本考案によるフランジを有する真空容
器の断面図、第２図は本考案によるフランジの断
面図、第３図は本考案によるフランジ部の部分リ
ーク試験法を示す断面図、第４図は本考案による
フランジ部のリーク仮止め法を示す断面図、第５
図は従来のフランジ方式を示す断面図である。
１……主真空容器、２……フランジ、３……付
属真空容器、４……フランジ、５……主ガスケツ
ト、６……スラストギヤツプ、７……補助ガスケ
ツト、８……補助真空室、９……連通穴、１０…
…閉止板、１１……連通穴、１２……閉止板、１
３……締付ボルト、１４……配管、１５……真空
ポンプ付リークデイテイクタ、１６……配管、１
７……小形真空ポンプ、１８……閉止板。
Fig. 1 is a cross-sectional view of a vacuum vessel having a flange according to the present invention, Fig. 2 is a cross-sectional view of a flange according to the present invention, Fig. 3 is a cross-sectional view showing a partial leak test method of a flange portion according to the present invention, and Fig. 4 5 is a cross-sectional view showing the leak temporary fixing method of the flange part according to the present invention.
The figure is a sectional view showing a conventional flange method. 1... Main vacuum vessel, 2... Flange, 3... Attached vacuum vessel, 4... Flange, 5... Main gasket, 6... Thrust gap, 7... Auxiliary gasket, 8... Auxiliary vacuum chamber, 9... ...Communication hole, 10...
...Closing plate, 11...Communication hole, 12...Closing plate, 1
3... Tightening bolt, 14... Piping, 15... Leak detector with vacuum pump, 16... Piping, 1
7...Small vacuum pump, 18...Closing plate.
Claims (1)
に、主ガスケツトと補助ガスケツトを二重に配置
すると共に、この二重に配置したガスケツトによ
り補助真空室を形成し、かつ、この補助真空室に
始端としてフランジの内外面側を終端とする連通
穴を設けた真空容器用フランジにおいて、 前記主ガスケツトを主真空容器と付層真空容器
のフランジの面間に挿入すると共に、前記補助ガ
スケツトを主真空容器と付層真空容器のフランジ
間に設けられたスラスト方向のギヤツプに挿入し
、かつ、前記連通穴の終端部には、取付け取外し
可能な閉止板を設けたことを特徴とする真空容器
用フランジ。[Claim for Utility Model Registration] A main gasket and an auxiliary gasket are arranged in a double manner in the seal of the joint between the main vacuum container and the attached vacuum container, and an auxiliary vacuum chamber is formed by the double arrangement of gaskets, and in a flange for a vacuum vessel having a communication hole starting in the auxiliary vacuum chamber and terminating at the inner and outer surfaces of the flange, the main gasket is inserted between the surfaces of the flanges of the main vacuum vessel and the layered vacuum vessel, and , the auxiliary gasket is inserted into a gap in the thrust direction provided between the flanges of the main vacuum vessel and the auxiliary vacuum vessel, and a removable closing plate is provided at the end of the communication hole. Features a flange for vacuum containers.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987179564U JPH0183969U (en) | 1987-11-27 | 1987-11-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987179564U JPH0183969U (en) | 1987-11-27 | 1987-11-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0183969U true JPH0183969U (en) | 1989-06-05 |
Family
ID=31471111
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987179564U Pending JPH0183969U (en) | 1987-11-27 | 1987-11-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0183969U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0534357U (en) * | 1991-09-03 | 1993-05-07 | 石川島播磨重工業株式会社 | Sealing structure for the flange of containers, etc. |
| JP2005325973A (en) * | 2004-05-17 | 2005-11-24 | Sigma Meltec Ltd | Sealing structure for processing chamber device |
-
1987
- 1987-11-27 JP JP1987179564U patent/JPH0183969U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0534357U (en) * | 1991-09-03 | 1993-05-07 | 石川島播磨重工業株式会社 | Sealing structure for the flange of containers, etc. |
| JP2005325973A (en) * | 2004-05-17 | 2005-11-24 | Sigma Meltec Ltd | Sealing structure for processing chamber device |