JPH0183337U - - Google Patents
Info
- Publication number
- JPH0183337U JPH0183337U JP1987179795U JP17979587U JPH0183337U JP H0183337 U JPH0183337 U JP H0183337U JP 1987179795 U JP1987179795 U JP 1987179795U JP 17979587 U JP17979587 U JP 17979587U JP H0183337 U JPH0183337 U JP H0183337U
- Authority
- JP
- Japan
- Prior art keywords
- chuck
- contact aligner
- substrate
- main plane
- lowered
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987179795U JPH0183337U (en:Method) | 1987-11-26 | 1987-11-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987179795U JPH0183337U (en:Method) | 1987-11-26 | 1987-11-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0183337U true JPH0183337U (en:Method) | 1989-06-02 |
Family
ID=31471337
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987179795U Pending JPH0183337U (en:Method) | 1987-11-26 | 1987-11-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0183337U (en:Method) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59151426A (ja) * | 1983-01-21 | 1984-08-29 | フィリップス エレクトロニクス ネムローゼ フェンノートシャップ | 薄い基板を写真平版処理する装置 |
| JPS609125A (ja) * | 1983-06-29 | 1985-01-18 | Hitachi Ltd | パターン焼付け装置 |
-
1987
- 1987-11-26 JP JP1987179795U patent/JPH0183337U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59151426A (ja) * | 1983-01-21 | 1984-08-29 | フィリップス エレクトロニクス ネムローゼ フェンノートシャップ | 薄い基板を写真平版処理する装置 |
| JPS609125A (ja) * | 1983-06-29 | 1985-01-18 | Hitachi Ltd | パターン焼付け装置 |