JPH017730Y2 - - Google Patents
Info
- Publication number
- JPH017730Y2 JPH017730Y2 JP9940287U JP9940287U JPH017730Y2 JP H017730 Y2 JPH017730 Y2 JP H017730Y2 JP 9940287 U JP9940287 U JP 9940287U JP 9940287 U JP9940287 U JP 9940287U JP H017730 Y2 JPH017730 Y2 JP H017730Y2
- Authority
- JP
- Japan
- Prior art keywords
- doping
- metal
- silicon
- jig
- single crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 33
- 239000010703 silicon Substances 0.000 claims description 33
- 229910052710 silicon Inorganic materials 0.000 claims description 33
- 229910052751 metal Inorganic materials 0.000 claims description 28
- 239000002184 metal Substances 0.000 claims description 28
- 239000013078 crystal Substances 0.000 claims description 18
- 239000007788 liquid Substances 0.000 claims description 13
- 230000008018 melting Effects 0.000 claims description 8
- 238000002844 melting Methods 0.000 claims description 8
- 239000011148 porous material Substances 0.000 claims description 5
- 239000010453 quartz Substances 0.000 claims description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 5
- 238000005259 measurement Methods 0.000 claims description 2
- 238000000034 method Methods 0.000 description 10
- 239000002019 doping agent Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 238000001704 evaporation Methods 0.000 description 3
- 238000002347 injection Methods 0.000 description 3
- 239000007924 injection Substances 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000004090 dissolution Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 239000000155 melt Substances 0.000 description 2
- 239000002210 silicon-based material Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- LIXXICXIKUPJBX-UHFFFAOYSA-N [Pt].[Rh].[Pt] Chemical compound [Pt].[Rh].[Pt] LIXXICXIKUPJBX-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000010186 staining Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9940287U JPH017730Y2 (enrdf_load_stackoverflow) | 1987-06-30 | 1987-06-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9940287U JPH017730Y2 (enrdf_load_stackoverflow) | 1987-06-30 | 1987-06-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63106775U JPS63106775U (enrdf_load_stackoverflow) | 1988-07-09 |
| JPH017730Y2 true JPH017730Y2 (enrdf_load_stackoverflow) | 1989-03-01 |
Family
ID=30968248
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9940287U Expired JPH017730Y2 (enrdf_load_stackoverflow) | 1987-06-30 | 1987-06-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH017730Y2 (enrdf_load_stackoverflow) |
-
1987
- 1987-06-30 JP JP9940287U patent/JPH017730Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63106775U (enrdf_load_stackoverflow) | 1988-07-09 |
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