JPH017723Y2 - - Google Patents
Info
- Publication number
- JPH017723Y2 JPH017723Y2 JP15997382U JP15997382U JPH017723Y2 JP H017723 Y2 JPH017723 Y2 JP H017723Y2 JP 15997382 U JP15997382 U JP 15997382U JP 15997382 U JP15997382 U JP 15997382U JP H017723 Y2 JPH017723 Y2 JP H017723Y2
- Authority
- JP
- Japan
- Prior art keywords
- pipe
- gas phase
- rotary joint
- pipes
- cvd method
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000002994 raw material Substances 0.000 claims description 7
- 238000005229 chemical vapour deposition Methods 0.000 claims description 6
- 238000007789 sealing Methods 0.000 claims description 3
- 230000013011 mating Effects 0.000 claims 1
- 239000011521 glass Substances 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 229920002449 FKM Polymers 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
Landscapes
- Joints Allowing Movement (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15997382U JPS5964966U (ja) | 1982-10-22 | 1982-10-22 | 内付けｃｖｄ法用ロ−タリ−ジヨイント |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15997382U JPS5964966U (ja) | 1982-10-22 | 1982-10-22 | 内付けｃｖｄ法用ロ−タリ−ジヨイント |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5964966U JPS5964966U (ja) | 1984-04-28 |
| JPH017723Y2 true JPH017723Y2 (tr) | 1989-03-01 |
Family
ID=30351995
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15997382U Granted JPS5964966U (ja) | 1982-10-22 | 1982-10-22 | 内付けｃｖｄ法用ロ−タリ−ジヨイント |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5964966U (tr) |
-
1982
- 1982-10-22 JP JP15997382U patent/JPS5964966U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5964966U (ja) | 1984-04-28 |
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