JPH0176027U - - Google Patents
Info
- Publication number
- JPH0176027U JPH0176027U JP1987170549U JP17054987U JPH0176027U JP H0176027 U JPH0176027 U JP H0176027U JP 1987170549 U JP1987170549 U JP 1987170549U JP 17054987 U JP17054987 U JP 17054987U JP H0176027 U JPH0176027 U JP H0176027U
- Authority
- JP
- Japan
- Prior art keywords
- sample chamber
- chamber
- plasma
- ecr
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 3
- 239000010408 film Substances 0.000 claims 2
- 230000008021 deposition Effects 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987170549U JPH0176027U (de) | 1987-11-08 | 1987-11-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987170549U JPH0176027U (de) | 1987-11-08 | 1987-11-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0176027U true JPH0176027U (de) | 1989-05-23 |
Family
ID=31461595
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987170549U Pending JPH0176027U (de) | 1987-11-08 | 1987-11-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0176027U (de) |
-
1987
- 1987-11-08 JP JP1987170549U patent/JPH0176027U/ja active Pending
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