JPH0175880U - - Google Patents
Info
- Publication number
- JPH0175880U JPH0175880U JP1987171679U JP17167987U JPH0175880U JP H0175880 U JPH0175880 U JP H0175880U JP 1987171679 U JP1987171679 U JP 1987171679U JP 17167987 U JP17167987 U JP 17167987U JP H0175880 U JPH0175880 U JP H0175880U
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- section
- air
- specimen
- test device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007664 blowing Methods 0.000 claims description 2
- 238000011084 recovery Methods 0.000 claims 2
- 238000010992 reflux Methods 0.000 claims 1
- 238000012216 screening Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 229920000742 Cotton Polymers 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
Description
第１図は本考案の実施例１の全体構成図、第２
図は本考案の送風ガイドを示す平面図、第３図は
第２図のＡ―Ａ線断面図、第４図は本考案の実施
例２の全体構成図、第５図は従来例を示す全体構
成図である。
１……高低温供給試験装置、２……ホース、３
……アーム、４……キヤツプ、５……供試品（大
規模集積回路）、６……試験インタフエース台、
７……インタフエースボード、８……インタフエ
ース電子回路、９……送風ガイド円筒フツク、１
０……Ｌ型ガイド円筒管、１１……絶縁板、１２
……高低温ガイド口径変換部、１３……高低温誘
導管、１４……熱遮断綿、１５……ケーブル、１
６……試験点検設備、１７……接触型マイクロス
イツチ。
Figure 1 is an overall configuration diagram of Embodiment 1 of the present invention;
The figure is a plan view showing the air blowing guide of the present invention, Figure 3 is a sectional view taken along the line AA in Figure 2, Figure 4 is an overall configuration diagram of Embodiment 2 of the present invention, and Figure 5 is a conventional example. It is an overall configuration diagram. 1...High and low temperature supply test device, 2...Hose, 3
...Arm, 4...Cap, 5...Product under test (large-scale integrated circuit), 6...Test interface stand,
7...Interface board, 8...Interface electronic circuit, 9...Blower guide cylindrical hook, 1
0... L-shaped guide cylindrical tube, 11... Insulating plate, 12
...High and low temperature guide diameter conversion section, 13 ... High and low temperature guide tube, 14 ... Heat shielding cotton, 15 ... Cable, 1
6...Testing and inspection equipment, 17...Contact type micro switch.
Claims (1)
高低温供給試験装置から供給された高温又は低温
の気体を供試品に吹き付ける吹出部と、供試品に
吹き付けられた気体を回収する回収部と、回収さ
れた気体を前記高低温供給試験装置に供給する環
流部とを有することを特徴とする高低温送風ガイ
ド。 In temperature screening test equipment for large-scale integrated circuits,
A blow-off section that blows high or low temperature gas supplied from the high-temperature supply test device onto the specimen; a recovery section that recovers the gas blown onto the specimen; and a recovery section that supplies the recovered gas to the high-temperature supply test device. A high-temperature air blowing guide characterized by having a reflux section that supplies air to the air.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987171679U JPH0175880U (en) | 1987-11-10 | 1987-11-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987171679U JPH0175880U (en) | 1987-11-10 | 1987-11-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0175880U true JPH0175880U (en) | 1989-05-23 |
Family
ID=31463694
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987171679U Pending JPH0175880U (en) | 1987-11-10 | 1987-11-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0175880U (en) |
-
1987
- 1987-11-10 JP JP1987171679U patent/JPH0175880U/ja active Pending
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