JPH0173924U - - Google Patents

Info

Publication number
JPH0173924U
JPH0173924U JP1987170188U JP17018887U JPH0173924U JP H0173924 U JPH0173924 U JP H0173924U JP 1987170188 U JP1987170188 U JP 1987170188U JP 17018887 U JP17018887 U JP 17018887U JP H0173924 U JPH0173924 U JP H0173924U
Authority
JP
Japan
Prior art keywords
wafer
temperature
support
take
vertical movement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1987170188U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0648830Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987170188U priority Critical patent/JPH0648830Y2/ja
Publication of JPH0173924U publication Critical patent/JPH0173924U/ja
Application granted granted Critical
Publication of JPH0648830Y2 publication Critical patent/JPH0648830Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP1987170188U 1987-11-06 1987-11-06 ウェーハ搬送機 Expired - Lifetime JPH0648830Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987170188U JPH0648830Y2 (ja) 1987-11-06 1987-11-06 ウェーハ搬送機

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987170188U JPH0648830Y2 (ja) 1987-11-06 1987-11-06 ウェーハ搬送機

Publications (2)

Publication Number Publication Date
JPH0173924U true JPH0173924U (enExample) 1989-05-18
JPH0648830Y2 JPH0648830Y2 (ja) 1994-12-12

Family

ID=31460914

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987170188U Expired - Lifetime JPH0648830Y2 (ja) 1987-11-06 1987-11-06 ウェーハ搬送機

Country Status (1)

Country Link
JP (1) JPH0648830Y2 (enExample)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57211729A (en) * 1981-06-23 1982-12-25 Fujitsu Ltd Furnace for semiconductor heat treatment
JPS619839U (ja) * 1984-06-22 1986-01-21 真空理工株式会社 半導体アニ−ル装置におけるウエハ搬送装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57211729A (en) * 1981-06-23 1982-12-25 Fujitsu Ltd Furnace for semiconductor heat treatment
JPS619839U (ja) * 1984-06-22 1986-01-21 真空理工株式会社 半導体アニ−ル装置におけるウエハ搬送装置

Also Published As

Publication number Publication date
JPH0648830Y2 (ja) 1994-12-12

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