JPH0171436U - - Google Patents
Info
- Publication number
- JPH0171436U JPH0171436U JP1987168083U JP16808387U JPH0171436U JP H0171436 U JPH0171436 U JP H0171436U JP 1987168083 U JP1987168083 U JP 1987168083U JP 16808387 U JP16808387 U JP 16808387U JP H0171436 U JPH0171436 U JP H0171436U
- Authority
- JP
- Japan
- Prior art keywords
- atmospheric gas
- irradiating
- ports
- semiconductor substrate
- heat treatment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000137 annealing Methods 0.000 claims description 3
- 239000010453 quartz Substances 0.000 claims description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 2
- 229910052736 halogen Inorganic materials 0.000 claims 1
- 150000002367 halogens Chemical class 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987168083U JPH0171436U (cs) | 1987-11-02 | 1987-11-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987168083U JPH0171436U (cs) | 1987-11-02 | 1987-11-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0171436U true JPH0171436U (cs) | 1989-05-12 |
Family
ID=31456950
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987168083U Pending JPH0171436U (cs) | 1987-11-02 | 1987-11-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0171436U (cs) |
-
1987
- 1987-11-02 JP JP1987168083U patent/JPH0171436U/ja active Pending
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