JPH0170137U - - Google Patents
Info
- Publication number
- JPH0170137U JPH0170137U JP1987165212U JP16521287U JPH0170137U JP H0170137 U JPH0170137 U JP H0170137U JP 1987165212 U JP1987165212 U JP 1987165212U JP 16521287 U JP16521287 U JP 16521287U JP H0170137 U JPH0170137 U JP H0170137U
- Authority
- JP
- Japan
- Prior art keywords
- light
- warpage
- measured
- detection element
- position detection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 4
- 238000001514 detection method Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 5
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987165212U JPH0170137U (enrdf_load_stackoverflow) | 1987-10-27 | 1987-10-27 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987165212U JPH0170137U (enrdf_load_stackoverflow) | 1987-10-27 | 1987-10-27 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0170137U true JPH0170137U (enrdf_load_stackoverflow) | 1989-05-10 |
Family
ID=31451492
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1987165212U Pending JPH0170137U (enrdf_load_stackoverflow) | 1987-10-27 | 1987-10-27 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0170137U (enrdf_load_stackoverflow) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2018119980A (ja) * | 2013-03-12 | 2018-08-02 | ストライカー・コーポレイション | 力及びトルクを測定するためのセンサ組立体及び方法 |
-
1987
- 1987-10-27 JP JP1987165212U patent/JPH0170137U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2018119980A (ja) * | 2013-03-12 | 2018-08-02 | ストライカー・コーポレイション | 力及びトルクを測定するためのセンサ組立体及び方法 |
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