JPH0169692U - - Google Patents
Info
- Publication number
- JPH0169692U JPH0169692U JP1987162422U JP16242287U JPH0169692U JP H0169692 U JPH0169692 U JP H0169692U JP 1987162422 U JP1987162422 U JP 1987162422U JP 16242287 U JP16242287 U JP 16242287U JP H0169692 U JPH0169692 U JP H0169692U
- Authority
- JP
- Japan
- Prior art keywords
- tank
- cleaning
- cleaning device
- forth
- types
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 7
- 238000002347 injection Methods 0.000 claims description 4
- 239000007924 injection Substances 0.000 claims description 4
- 239000007788 liquid Substances 0.000 claims 1
- 230000010355 oscillation Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000004506 ultrasonic cleaning Methods 0.000 description 1
Description
第１図は本案の一実施例である砥粒専用洗浄装
置の槽構成図、第２図は一般市販の３槽式超音波
洗浄装置を示す図である。
１…初槽、２…中間槽、３…最終槽、４…搬送
系、５…槽上噴射ユニツト、６…超音波発振部、
７…液中噴射ユニツト、８…送給ポンプ、９…噴
射開始バルブ、１０…冷却パイプ、１１…被洗浄
部材、１２…仮想治具位置、１３…洗浄治具、１
４…加熱ヒータ、Ｐ…圧力計器、Ｑ…送給タンク
。
FIG. 1 is a tank configuration diagram of a dedicated abrasive cleaning device which is an embodiment of the present invention, and FIG. 2 is a diagram showing a commercially available three-tank ultrasonic cleaning device. 1... Initial tank, 2... Intermediate tank, 3... Final tank, 4... Conveyance system, 5... Tank top injection unit, 6... Ultrasonic oscillator,
7... Submerged injection unit, 8... Feed pump, 9... Injection start valve, 10... Cooling pipe, 11... Member to be cleaned, 12... Virtual jig position, 13... Cleaning jig, 1
4...Heating heater, P...Pressure gauge, Q...Feeding tank.
Claims (1)
上に噴射ノズル部材を設け、また下部槽内液中に
横置の超音波発振部材を設け、その２種の洗浄部
に対し、被洗浄部材が交互に往復移動して洗浄を
繰返すサイクル洗浄機能を有することを特徴とす
る洗浄装置。 In a cleaning device with a multi-tank configuration, an injection nozzle member is provided on the tank within the same tank section, and a horizontal ultrasonic oscillation member is provided in the liquid in the lower tank, and for the two types of cleaning parts, A cleaning device characterized by having a cycle cleaning function in which a member to be cleaned alternately moves back and forth to repeat cleaning.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987162422U JPH0169692U (en) | 1987-10-26 | 1987-10-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987162422U JPH0169692U (en) | 1987-10-26 | 1987-10-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0169692U true JPH0169692U (en) | 1989-05-09 |
Family
ID=31446233
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987162422U Pending JPH0169692U (en) | 1987-10-26 | 1987-10-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0169692U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0525447U (en) * | 1991-05-22 | 1993-04-02 | 株式会社プロセスメンテ | Rack cleaning device for photolithography processor |
| JP2000167498A (en) * | 1998-12-01 | 2000-06-20 | Honda Motor Co Ltd | Vacuum cleaner |
| JP2009279564A (en) * | 2008-05-26 | 2009-12-03 | Toyota Motor Corp | Apparatus and method for cleaning machined hole |
-
1987
- 1987-10-26 JP JP1987162422U patent/JPH0169692U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0525447U (en) * | 1991-05-22 | 1993-04-02 | 株式会社プロセスメンテ | Rack cleaning device for photolithography processor |
| JP2000167498A (en) * | 1998-12-01 | 2000-06-20 | Honda Motor Co Ltd | Vacuum cleaner |
| JP2009279564A (en) * | 2008-05-26 | 2009-12-03 | Toyota Motor Corp | Apparatus and method for cleaning machined hole |