JPH0167735U - - Google Patents
Info
- Publication number
- JPH0167735U JPH0167735U JP1987163475U JP16347587U JPH0167735U JP H0167735 U JPH0167735 U JP H0167735U JP 1987163475 U JP1987163475 U JP 1987163475U JP 16347587 U JP16347587 U JP 16347587U JP H0167735 U JPH0167735 U JP H0167735U
- Authority
- JP
- Japan
- Prior art keywords
- resist
- substrate
- spin
- drying
- rotate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 8
- 238000001035 drying Methods 0.000 claims description 5
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 239000007788 liquid Substances 0.000 claims 1
- 238000004528 spin coating Methods 0.000 claims 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987163475U JPH0167735U (da) | 1987-10-26 | 1987-10-26 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987163475U JPH0167735U (da) | 1987-10-26 | 1987-10-26 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0167735U true JPH0167735U (da) | 1989-05-01 |
Family
ID=31448229
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1987163475U Pending JPH0167735U (da) | 1987-10-26 | 1987-10-26 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0167735U (da) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03101866A (ja) * | 1989-09-13 | 1991-04-26 | Tokyo Ohka Kogyo Co Ltd | 被膜形成装置 |
-
1987
- 1987-10-26 JP JP1987163475U patent/JPH0167735U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03101866A (ja) * | 1989-09-13 | 1991-04-26 | Tokyo Ohka Kogyo Co Ltd | 被膜形成装置 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPH0167735U (da) | ||
JPS6470168A (en) | Liquid chemical applicator | |
JPH0199473U (da) | ||
JPH02118926U (da) | ||
JPH0375530U (da) | ||
JPH0390675U (da) | ||
JPH0399431U (da) | ||
JPS59192835U (ja) | スピンナ | |
JPS6343425U (da) | ||
JPH0215864U (da) | ||
JPS6168396U (da) | ||
JPH02132933U (da) | ||
JPH02129728U (da) | ||
JPH02132941U (da) | ||
JPH0265333U (da) | ||
JPH01177269U (da) | ||
JPS6332678U (da) | ||
JPH01165634U (da) | ||
JPH0161975U (da) | ||
JPH0192130U (da) | ||
JPS639130U (da) | ||
JPS6448170U (da) | ||
JPS6234425U (da) | ||
JPH0366674U (da) | ||
JPS60117034U (ja) | 半導体真空回転チヤツク |