JPH0166046U - - Google Patents
Info
- Publication number
- JPH0166046U JPH0166046U JP1987161169U JP16116987U JPH0166046U JP H0166046 U JPH0166046 U JP H0166046U JP 1987161169 U JP1987161169 U JP 1987161169U JP 16116987 U JP16116987 U JP 16116987U JP H0166046 U JPH0166046 U JP H0166046U
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- substrate
- pressure
- sensor chip
- strain
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 claims description 5
- 239000011521 glass Substances 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims 3
- 239000004065 semiconductor Substances 0.000 claims 2
- 239000000919 ceramic Substances 0.000 claims 1
- 238000009792 diffusion process Methods 0.000 claims 1
- 238000005468 ion implantation Methods 0.000 claims 1
- 238000005259 measurement Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 7
- 239000000203 mixture Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987161169U JPH0166046U (it) | 1987-10-21 | 1987-10-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987161169U JPH0166046U (it) | 1987-10-21 | 1987-10-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0166046U true JPH0166046U (it) | 1989-04-27 |
Family
ID=31443885
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987161169U Pending JPH0166046U (it) | 1987-10-21 | 1987-10-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0166046U (it) |
-
1987
- 1987-10-21 JP JP1987161169U patent/JPH0166046U/ja active Pending
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