JPH0165871U - - Google Patents
Info
- Publication number
- JPH0165871U JPH0165871U JP1987160687U JP16068787U JPH0165871U JP H0165871 U JPH0165871 U JP H0165871U JP 1987160687 U JP1987160687 U JP 1987160687U JP 16068787 U JP16068787 U JP 16068787U JP H0165871 U JPH0165871 U JP H0165871U
- Authority
- JP
- Japan
- Prior art keywords
- epitaxial growth
- furnace
- baking
- semiconductor substrate
- epitaxially growing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 4
- 239000012535 impurity Substances 0.000 claims description 2
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987160687U JPH0165871U (es) | 1987-10-20 | 1987-10-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987160687U JPH0165871U (es) | 1987-10-20 | 1987-10-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0165871U true JPH0165871U (es) | 1989-04-27 |
Family
ID=31442972
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987160687U Pending JPH0165871U (es) | 1987-10-20 | 1987-10-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0165871U (es) |
-
1987
- 1987-10-20 JP JP1987160687U patent/JPH0165871U/ja active Pending
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