JPH0164057U - - Google Patents
Info
- Publication number
- JPH0164057U JPH0164057U JP1987159802U JP15980287U JPH0164057U JP H0164057 U JPH0164057 U JP H0164057U JP 1987159802 U JP1987159802 U JP 1987159802U JP 15980287 U JP15980287 U JP 15980287U JP H0164057 U JPH0164057 U JP H0164057U
- Authority
- JP
- Japan
- Prior art keywords
- lens
- imaging
- substrate sample
- light
- collimator lens
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000003384 imaging method Methods 0.000 claims description 6
- 230000007547 defect Effects 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 4
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987159802U JPH0164057U (sh) | 1987-10-19 | 1987-10-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987159802U JPH0164057U (sh) | 1987-10-19 | 1987-10-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0164057U true JPH0164057U (sh) | 1989-04-25 |
Family
ID=31441322
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987159802U Pending JPH0164057U (sh) | 1987-10-19 | 1987-10-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0164057U (sh) |
-
1987
- 1987-10-19 JP JP1987159802U patent/JPH0164057U/ja active Pending
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