JPH0164007U - - Google Patents
Info
- Publication number
- JPH0164007U JPH0164007U JP1987159569U JP15956987U JPH0164007U JP H0164007 U JPH0164007 U JP H0164007U JP 1987159569 U JP1987159569 U JP 1987159569U JP 15956987 U JP15956987 U JP 15956987U JP H0164007 U JPH0164007 U JP H0164007U
- Authority
- JP
- Japan
- Prior art keywords
- target sheet
- measuring device
- displacement measuring
- optical displacement
- microcube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000006073 displacement reaction Methods 0.000 claims description 5
- 230000003287 optical effect Effects 0.000 claims description 5
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Optical Transform (AREA)
Description
第１図は本考案の光学式変位測定装置用ターゲ
ツトシートの一実施例を示す構成図、第２図は本
考案の光学式変位測定装置用ターゲツトシートが
使用される光学式変位測定装置の一例を示す構成
図、第３図はターゲツトシートＴＳにおけるナチ
ユラルパターンＰｎの様子を示す図、第４図はタ
ーゲツトシートＴＳに形成する格子パターンＰｍ
の様子を示す図である。
１……光源、２１，２２……ハーフミラー、３
１，３２……レンズ、４……絞り、５ｘ，５ｙ…
…イメージセンサ、６……信号処理回路、ＴＧ…
…被測定物体（ターゲツト）、ＴＳ……ターゲツ
トシート、ＭＣＣ……マイクロキユーブコーナ、
Ｐｎ……ナチユラルパターン、Ｐｍ……格子パタ
ーン。
Fig. 1 is a configuration diagram showing an embodiment of the target sheet for an optical displacement measuring device of the present invention, and Fig. 2 is an example of an optical displacement measuring device in which the target sheet for an optical displacement measuring device of the present invention is used. 3 is a diagram showing the natural pattern Pn on the target sheet TS, and FIG. 4 is a diagram showing the lattice pattern Pm formed on the target sheet TS.
FIG. 1...Light source, 21, 22...Half mirror, 3
1, 32...Lens, 4...Aperture, 5x, 5y...
...Image sensor, 6...Signal processing circuit, TG...
...Object to be measured (target), TS...Target sheet, MCC...Microcube corner,
Pn...natural pattern, Pm...lattice pattern.
Claims (1)
もにその表面に直交座標Ｘ、Ｙに応じた格子パタ
ーンを形成するようにした光学式変位測定装置用
ターゲツトシートにおいて、前記マイクロキユー
ブコーナにより形成されるナチユラルパターンに
対してこのナチユラルパターンが線対称となるよ
うな対称軸を任意に選択するとともに、前記格子
パターンに対してＸ＝Ｙなる直線を求め、この直
線が前記対称軸と一致するように前記格子パター
ンを形成してなる光学式変位測定装置用ターゲツ
トシート。 A target sheet for an optical displacement measuring device in which microcube corners are spread over one surface and a lattice pattern according to orthogonal coordinates X and Y is formed on the surface thereof, in which a natural pattern is formed by the microcube corners. At the same time, arbitrarily select an axis of symmetry such that this natural pattern is line symmetrical to A target sheet for an optical displacement measuring device formed by forming a target sheet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15956987U JPH0543366Y2 (en) | 1987-10-19 | 1987-10-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15956987U JPH0543366Y2 (en) | 1987-10-19 | 1987-10-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0164007U true JPH0164007U (en) | 1989-04-25 |
| JPH0543366Y2 JPH0543366Y2 (en) | 1993-11-01 |
Family
ID=31440898
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15956987U Expired - Lifetime JPH0543366Y2 (en) | 1987-10-19 | 1987-10-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0543366Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5373986B1 (en) * | 2013-02-15 | 2013-12-18 | 株式会社Ｉｈｉ | Non-land surface dimension measuring method and apparatus |
-
1987
- 1987-10-19 JP JP15956987U patent/JPH0543366Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5373986B1 (en) * | 2013-02-15 | 2013-12-18 | 株式会社Ｉｈｉ | Non-land surface dimension measuring method and apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0543366Y2 (en) | 1993-11-01 |
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