JPH0162357U - - Google Patents

Info

Publication number
JPH0162357U
JPH0162357U JP12963088U JP12963088U JPH0162357U JP H0162357 U JPH0162357 U JP H0162357U JP 12963088 U JP12963088 U JP 12963088U JP 12963088 U JP12963088 U JP 12963088U JP H0162357 U JPH0162357 U JP H0162357U
Authority
JP
Japan
Prior art keywords
sputtering
anode
target
cylindrical
anodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12963088U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0136910Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12963088U priority Critical patent/JPH0136910Y2/ja
Publication of JPH0162357U publication Critical patent/JPH0162357U/ja
Application granted granted Critical
Publication of JPH0136910Y2 publication Critical patent/JPH0136910Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Photoreceptors In Electrophotography (AREA)
  • Physical Vapour Deposition (AREA)
JP12963088U 1988-10-04 1988-10-04 Expired JPH0136910Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12963088U JPH0136910Y2 (enExample) 1988-10-04 1988-10-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12963088U JPH0136910Y2 (enExample) 1988-10-04 1988-10-04

Publications (2)

Publication Number Publication Date
JPH0162357U true JPH0162357U (enExample) 1989-04-20
JPH0136910Y2 JPH0136910Y2 (enExample) 1989-11-08

Family

ID=31384082

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12963088U Expired JPH0136910Y2 (enExample) 1988-10-04 1988-10-04

Country Status (1)

Country Link
JP (1) JPH0136910Y2 (enExample)

Also Published As

Publication number Publication date
JPH0136910Y2 (enExample) 1989-11-08

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