JPH0161975U - - Google Patents

Info

Publication number
JPH0161975U
JPH0161975U JP15777587U JP15777587U JPH0161975U JP H0161975 U JPH0161975 U JP H0161975U JP 15777587 U JP15777587 U JP 15777587U JP 15777587 U JP15777587 U JP 15777587U JP H0161975 U JPH0161975 U JP H0161975U
Authority
JP
Japan
Prior art keywords
control port
coated
rotating table
coating device
coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15777587U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15777587U priority Critical patent/JPH0161975U/ja
Publication of JPH0161975U publication Critical patent/JPH0161975U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP15777587U 1987-10-15 1987-10-15 Pending JPH0161975U (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15777587U JPH0161975U (cs) 1987-10-15 1987-10-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15777587U JPH0161975U (cs) 1987-10-15 1987-10-15

Publications (1)

Publication Number Publication Date
JPH0161975U true JPH0161975U (cs) 1989-04-20

Family

ID=31437511

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15777587U Pending JPH0161975U (cs) 1987-10-15 1987-10-15

Country Status (1)

Country Link
JP (1) JPH0161975U (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012151238A (ja) * 2011-01-18 2012-08-09 Tokyo Electron Ltd 液処理装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61291072A (ja) * 1985-06-20 1986-12-20 Matsushita Electric Ind Co Ltd スピンコ−テイング方法
JPS6161070B2 (cs) * 1976-12-02 1986-12-24 Bofors Ab

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6161070B2 (cs) * 1976-12-02 1986-12-24 Bofors Ab
JPS61291072A (ja) * 1985-06-20 1986-12-20 Matsushita Electric Ind Co Ltd スピンコ−テイング方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012151238A (ja) * 2011-01-18 2012-08-09 Tokyo Electron Ltd 液処理装置

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