JPH0160945B2 - - Google Patents

Info

Publication number
JPH0160945B2
JPH0160945B2 JP60215458A JP21545885A JPH0160945B2 JP H0160945 B2 JPH0160945 B2 JP H0160945B2 JP 60215458 A JP60215458 A JP 60215458A JP 21545885 A JP21545885 A JP 21545885A JP H0160945 B2 JPH0160945 B2 JP H0160945B2
Authority
JP
Japan
Prior art keywords
wafer
leaf spring
suction plate
support
rotating arm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP60215458A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6276530A (ja
Inventor
Hiroyasu Tominaga
Hideya Matsumoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Electronics Engineering Co Ltd
Priority to JP21545885A priority Critical patent/JPS6276530A/ja
Publication of JPS6276530A publication Critical patent/JPS6276530A/ja
Publication of JPH0160945B2 publication Critical patent/JPH0160945B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Feeding Of Workpieces (AREA)
  • Manipulator (AREA)
  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
JP21545885A 1985-09-28 1985-09-28 ウェハ搬送機構 Granted JPS6276530A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21545885A JPS6276530A (ja) 1985-09-28 1985-09-28 ウェハ搬送機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21545885A JPS6276530A (ja) 1985-09-28 1985-09-28 ウェハ搬送機構

Publications (2)

Publication Number Publication Date
JPS6276530A JPS6276530A (ja) 1987-04-08
JPH0160945B2 true JPH0160945B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-12-26

Family

ID=16672704

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21545885A Granted JPS6276530A (ja) 1985-09-28 1985-09-28 ウェハ搬送機構

Country Status (1)

Country Link
JP (1) JPS6276530A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07263037A (ja) * 1994-03-18 1995-10-13 Nichifu Co Ltd 線状発熱体の接続構造
JP5223487B2 (ja) * 2008-06-23 2013-06-26 日産自動車株式会社 薄膜状ワークの積層方法および積層装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS516369Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1971-03-18 1976-02-21
JPS50117576U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1974-03-07 1975-09-25

Also Published As

Publication number Publication date
JPS6276530A (ja) 1987-04-08

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