JPH0160712B2 - - Google Patents
Info
- Publication number
- JPH0160712B2 JPH0160712B2 JP8694285A JP8694285A JPH0160712B2 JP H0160712 B2 JPH0160712 B2 JP H0160712B2 JP 8694285 A JP8694285 A JP 8694285A JP 8694285 A JP8694285 A JP 8694285A JP H0160712 B2 JPH0160712 B2 JP H0160712B2
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- stopper
- fluid
- spindle
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000012530 fluid Substances 0.000 claims description 28
- 229910045601 alloy Inorganic materials 0.000 claims description 8
- 239000000956 alloy Substances 0.000 claims description 8
- 239000004033 plastic Substances 0.000 claims description 8
- 229910001285 shape-memory alloy Inorganic materials 0.000 claims description 7
- KHYBPSFKEHXSLX-UHFFFAOYSA-N iminotitanium Chemical compound [Ti]=N KHYBPSFKEHXSLX-UHFFFAOYSA-N 0.000 claims description 5
- 229910001000 nickel titanium Inorganic materials 0.000 claims description 5
- 239000007789 gas Substances 0.000 description 21
- 238000003825 pressing Methods 0.000 description 6
- 239000002184 metal Substances 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 230000009466 transformation Effects 0.000 description 5
- 239000002923 metal particle Substances 0.000 description 4
- 239000012535 impurity Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 229920003002 synthetic resin Polymers 0.000 description 3
- 239000000057 synthetic resin Substances 0.000 description 3
- 229910017535 Cu-Al-Ni Inorganic materials 0.000 description 2
- 229910001069 Ti alloy Inorganic materials 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229910018167 Al—Be Inorganic materials 0.000 description 1
- 229910017773 Cu-Zn-Al Inorganic materials 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 210000004907 gland Anatomy 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Fluid-Pressure Circuits (AREA)
- Temperature-Responsive Valves (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8694285A JPS61244976A (ja) | 1985-04-23 | 1985-04-23 | 流体遮断開放器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8694285A JPS61244976A (ja) | 1985-04-23 | 1985-04-23 | 流体遮断開放器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61244976A JPS61244976A (ja) | 1986-10-31 |
| JPH0160712B2 true JPH0160712B2 (enrdf_load_stackoverflow) | 1989-12-25 |
Family
ID=13900923
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8694285A Granted JPS61244976A (ja) | 1985-04-23 | 1985-04-23 | 流体遮断開放器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61244976A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06114433A (ja) * | 1992-10-08 | 1994-04-26 | Tsukiyama Tec:Kk | 伸線機 |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6415576A (en) * | 1987-07-09 | 1989-01-19 | Hitachi Metals Ltd | Metallic diaphragm valve |
| JPH0674850B2 (ja) * | 1987-07-21 | 1994-09-21 | 日立金属株式会社 | 金属ダイヤフラム弁 |
| JPH0612146B2 (ja) * | 1987-10-14 | 1994-02-16 | 日立金属株式会社 | ノーマルクローズ型流量制御バルブ |
| JPH0251671A (ja) * | 1988-08-12 | 1990-02-21 | Motoyama Seisakusho:Kk | メタルダイヤフラム弁 |
| JPH03125955U (enrdf_load_stackoverflow) * | 1990-04-04 | 1991-12-19 | ||
| US5131627A (en) * | 1990-10-17 | 1992-07-21 | Nupro Company | Diaphragm valve |
| US5295662A (en) * | 1991-08-26 | 1994-03-22 | Masako Kiyohara | Fluid flow-controller with improved diaphragm |
| JP2573775B2 (ja) * | 1992-07-15 | 1997-01-22 | 日立金属株式会社 | 金属ダイヤフラム弁 |
| TW342429B (en) * | 1995-07-14 | 1998-10-11 | Tadahiro Omi | Fluid control system and valve used in it |
-
1985
- 1985-04-23 JP JP8694285A patent/JPS61244976A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06114433A (ja) * | 1992-10-08 | 1994-04-26 | Tsukiyama Tec:Kk | 伸線機 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61244976A (ja) | 1986-10-31 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| EXPY | Cancellation because of completion of term |