JPH0160452U - - Google Patents

Info

Publication number
JPH0160452U
JPH0160452U JP15498187U JP15498187U JPH0160452U JP H0160452 U JPH0160452 U JP H0160452U JP 15498187 U JP15498187 U JP 15498187U JP 15498187 U JP15498187 U JP 15498187U JP H0160452 U JPH0160452 U JP H0160452U
Authority
JP
Japan
Prior art keywords
proton beam
sample
vacuum
current
ring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15498187U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0622916Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15498187U priority Critical patent/JPH0622916Y2/ja
Publication of JPH0160452U publication Critical patent/JPH0160452U/ja
Application granted granted Critical
Publication of JPH0622916Y2 publication Critical patent/JPH0622916Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Sources, Ion Sources (AREA)
JP15498187U 1987-10-09 1987-10-09 表面解析装置 Expired - Lifetime JPH0622916Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15498187U JPH0622916Y2 (ja) 1987-10-09 1987-10-09 表面解析装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15498187U JPH0622916Y2 (ja) 1987-10-09 1987-10-09 表面解析装置

Publications (2)

Publication Number Publication Date
JPH0160452U true JPH0160452U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-04-17
JPH0622916Y2 JPH0622916Y2 (ja) 1994-06-15

Family

ID=31432194

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15498187U Expired - Lifetime JPH0622916Y2 (ja) 1987-10-09 1987-10-09 表面解析装置

Country Status (1)

Country Link
JP (1) JPH0622916Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPH0622916Y2 (ja) 1994-06-15

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