JPH0159696B2 - - Google Patents
Info
- Publication number
- JPH0159696B2 JPH0159696B2 JP57041518A JP4151882A JPH0159696B2 JP H0159696 B2 JPH0159696 B2 JP H0159696B2 JP 57041518 A JP57041518 A JP 57041518A JP 4151882 A JP4151882 A JP 4151882A JP H0159696 B2 JPH0159696 B2 JP H0159696B2
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- cesium
- ion source
- heating element
- wire
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910052792 caesium Inorganic materials 0.000 claims description 30
- TVFDJXOCXUVLDH-UHFFFAOYSA-N caesium atom Chemical compound [Cs] TVFDJXOCXUVLDH-UHFFFAOYSA-N 0.000 claims description 24
- -1 cesium compound Chemical class 0.000 claims description 8
- 229910052751 metal Inorganic materials 0.000 claims description 8
- 239000002184 metal Substances 0.000 claims description 8
- 239000000203 mixture Substances 0.000 claims description 6
- 239000003638 chemical reducing agent Substances 0.000 claims description 5
- 230000005684 electric field Effects 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 5
- 230000005611 electricity Effects 0.000 claims description 3
- 150000002500 ions Chemical class 0.000 description 10
- 239000007788 liquid Substances 0.000 description 8
- 238000001816 cooling Methods 0.000 description 5
- 238000010884 ion-beam technique Methods 0.000 description 4
- NCMHKCKGHRPLCM-UHFFFAOYSA-N caesium(1+) Chemical compound [Cs+] NCMHKCKGHRPLCM-UHFFFAOYSA-N 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000011148 porous material Substances 0.000 description 3
- 230000005284 excitation Effects 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- AIYUHDOJVYHVIT-UHFFFAOYSA-M caesium chloride Chemical compound [Cl-].[Cs+] AIYUHDOJVYHVIT-UHFFFAOYSA-M 0.000 description 1
- BROHICCPQMHYFY-UHFFFAOYSA-N caesium chromate Chemical compound [Cs+].[Cs+].[O-][Cr]([O-])(=O)=O BROHICCPQMHYFY-UHFFFAOYSA-N 0.000 description 1
- XQPRBTXUXXVTKB-UHFFFAOYSA-M caesium iodide Chemical compound [I-].[Cs+] XQPRBTXUXXVTKB-UHFFFAOYSA-M 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 239000011575 calcium Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 229910001338 liquidmetal Inorganic materials 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/26—Ion sources; Ion guns using surface ionisation, e.g. field effect ion sources, thermionic ion sources
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57041518A JPS58158839A (ja) | 1982-03-16 | 1982-03-16 | イオン源 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57041518A JPS58158839A (ja) | 1982-03-16 | 1982-03-16 | イオン源 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58158839A JPS58158839A (ja) | 1983-09-21 |
| JPH0159696B2 true JPH0159696B2 (enrdf_load_html_response) | 1989-12-19 |
Family
ID=12610590
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57041518A Granted JPS58158839A (ja) | 1982-03-16 | 1982-03-16 | イオン源 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58158839A (enrdf_load_html_response) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0616383B2 (ja) * | 1984-04-11 | 1994-03-02 | 株式会社日立製作所 | イオンビーム形成方法および液体金属イオン源 |
| EP0263815A4 (en) * | 1986-04-09 | 1988-11-29 | Schumacher Co J C | SEMICONDUCTOR DOPANT VAPORIZER. |
-
1982
- 1982-03-16 JP JP57041518A patent/JPS58158839A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58158839A (ja) | 1983-09-21 |
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