JPH0159113B2 - - Google Patents
Info
- Publication number
- JPH0159113B2 JPH0159113B2 JP56156884A JP15688481A JPH0159113B2 JP H0159113 B2 JPH0159113 B2 JP H0159113B2 JP 56156884 A JP56156884 A JP 56156884A JP 15688481 A JP15688481 A JP 15688481A JP H0159113 B2 JPH0159113 B2 JP H0159113B2
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- mask
- heating resistor
- alignment
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010438 heat treatment Methods 0.000 claims description 37
- 238000000034 method Methods 0.000 claims description 5
- 238000000206 photolithography Methods 0.000 claims description 3
- 239000010410 layer Substances 0.000 description 9
- 229920002120 photoresistant polymer Polymers 0.000 description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 230000007261 regionalization Effects 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/315—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of heat to a heat sensitive printing or impression-transfer material
- B41J2/32—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of heat to a heat sensitive printing or impression-transfer material using thermal heads
- B41J2/345—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of heat to a heat sensitive printing or impression-transfer material using thermal heads characterised by the arrangement of resistors or conductors
Landscapes
- Electronic Switches (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56156884A JPS5855260A (ja) | 1981-09-29 | 1981-09-29 | サーマルヘッドの発熱抵抗体パターン用マスク |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56156884A JPS5855260A (ja) | 1981-09-29 | 1981-09-29 | サーマルヘッドの発熱抵抗体パターン用マスク |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5855260A JPS5855260A (ja) | 1983-04-01 |
| JPH0159113B2 true JPH0159113B2 (enrdf_load_stackoverflow) | 1989-12-14 |
Family
ID=15637492
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56156884A Granted JPS5855260A (ja) | 1981-09-29 | 1981-09-29 | サーマルヘッドの発熱抵抗体パターン用マスク |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5855260A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2798403B2 (ja) * | 1988-07-03 | 1998-09-17 | キヤノン株式会社 | 記録素子駆動ユニット、インクジェット駆動ユニット及びインクジェット装置 |
-
1981
- 1981-09-29 JP JP56156884A patent/JPS5855260A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5855260A (ja) | 1983-04-01 |