JPH0158776U - - Google Patents

Info

Publication number
JPH0158776U
JPH0158776U JP15284787U JP15284787U JPH0158776U JP H0158776 U JPH0158776 U JP H0158776U JP 15284787 U JP15284787 U JP 15284787U JP 15284787 U JP15284787 U JP 15284787U JP H0158776 U JPH0158776 U JP H0158776U
Authority
JP
Japan
Prior art keywords
ion
generation chamber
ion generation
hollow cathode
electron impact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15284787U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15284787U priority Critical patent/JPH0158776U/ja
Publication of JPH0158776U publication Critical patent/JPH0158776U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP15284787U 1987-10-06 1987-10-06 Pending JPH0158776U (id)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15284787U JPH0158776U (id) 1987-10-06 1987-10-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15284787U JPH0158776U (id) 1987-10-06 1987-10-06

Publications (1)

Publication Number Publication Date
JPH0158776U true JPH0158776U (id) 1989-04-12

Family

ID=31428145

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15284787U Pending JPH0158776U (id) 1987-10-06 1987-10-06

Country Status (1)

Country Link
JP (1) JPH0158776U (id)

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