JPH0158454B2 - - Google Patents
Info
- Publication number
- JPH0158454B2 JPH0158454B2 JP59130616A JP13061684A JPH0158454B2 JP H0158454 B2 JPH0158454 B2 JP H0158454B2 JP 59130616 A JP59130616 A JP 59130616A JP 13061684 A JP13061684 A JP 13061684A JP H0158454 B2 JPH0158454 B2 JP H0158454B2
- Authority
- JP
- Japan
- Prior art keywords
- photoluminescence
- wafer
- sample
- light
- excitation laser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005424 photoluminescence Methods 0.000 claims description 42
- 230000003287 optical effect Effects 0.000 claims description 28
- 230000005284 excitation Effects 0.000 claims description 22
- 235000012431 wafers Nutrition 0.000 claims description 17
- 239000004065 semiconductor Substances 0.000 claims description 10
- 238000010521 absorption reaction Methods 0.000 claims description 5
- 238000004458 analytical method Methods 0.000 claims description 5
- 230000000644 propagated effect Effects 0.000 claims 1
- 238000000034 method Methods 0.000 description 11
- 239000013078 crystal Substances 0.000 description 10
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 9
- 230000007547 defect Effects 0.000 description 8
- 238000005259 measurement Methods 0.000 description 8
- 238000007796 conventional method Methods 0.000 description 6
- 238000009826 distribution Methods 0.000 description 6
- 239000012535 impurity Substances 0.000 description 6
- 230000004075 alteration Effects 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 238000004020 luminiscence type Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000009828 non-uniform distribution Methods 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- MUJOIMFVNIBMKC-UHFFFAOYSA-N fludioxonil Chemical compound C=12OC(F)(F)OC2=CC=CC=1C1=CNC=C1C#N MUJOIMFVNIBMKC-UHFFFAOYSA-N 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000000103 photoluminescence spectrum Methods 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/64—Fluorescence; Phosphorescence
- G01N21/6489—Photoluminescence of semiconductors
Landscapes
- Health & Medical Sciences (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13061684A JPS618649A (ja) | 1984-06-25 | 1984-06-25 | 光学測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13061684A JPS618649A (ja) | 1984-06-25 | 1984-06-25 | 光学測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS618649A JPS618649A (ja) | 1986-01-16 |
| JPH0158454B2 true JPH0158454B2 (de) | 1989-12-12 |
Family
ID=15038478
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13061684A Granted JPS618649A (ja) | 1984-06-25 | 1984-06-25 | 光学測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS618649A (de) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04503246A (ja) * | 1988-07-29 | 1992-06-11 | エディンバラ インストゥルメンツ リミテッド | 電子光学測定器具 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5788348A (en) * | 1980-11-21 | 1982-06-02 | Hitachi Ltd | Method and device for spectral fluorescence |
-
1984
- 1984-06-25 JP JP13061684A patent/JPS618649A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5788348A (en) * | 1980-11-21 | 1982-06-02 | Hitachi Ltd | Method and device for spectral fluorescence |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS618649A (ja) | 1986-01-16 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |