JPH0158123B2 - - Google Patents

Info

Publication number
JPH0158123B2
JPH0158123B2 JP3167384A JP3167384A JPH0158123B2 JP H0158123 B2 JPH0158123 B2 JP H0158123B2 JP 3167384 A JP3167384 A JP 3167384A JP 3167384 A JP3167384 A JP 3167384A JP H0158123 B2 JPH0158123 B2 JP H0158123B2
Authority
JP
Japan
Prior art keywords
vacuum
vacuum pump
alarm
degree
switch
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP3167384A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60176905A (ja
Inventor
Jinichiro Noritani
Akihiko Asai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Ecology Systems Co Ltd
Original Assignee
Matsushita Seiko Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Seiko Co Ltd filed Critical Matsushita Seiko Co Ltd
Priority to JP3167384A priority Critical patent/JPS60176905A/ja
Publication of JPS60176905A publication Critical patent/JPS60176905A/ja
Publication of JPH0158123B2 publication Critical patent/JPH0158123B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Separation Using Semi-Permeable Membranes (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
JP3167384A 1984-02-22 1984-02-22 酸素濃縮器 Granted JPS60176905A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3167384A JPS60176905A (ja) 1984-02-22 1984-02-22 酸素濃縮器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3167384A JPS60176905A (ja) 1984-02-22 1984-02-22 酸素濃縮器

Publications (2)

Publication Number Publication Date
JPS60176905A JPS60176905A (ja) 1985-09-11
JPH0158123B2 true JPH0158123B2 (enrdf_load_stackoverflow) 1989-12-08

Family

ID=12337640

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3167384A Granted JPS60176905A (ja) 1984-02-22 1984-02-22 酸素濃縮器

Country Status (1)

Country Link
JP (1) JPS60176905A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS60176905A (ja) 1985-09-11

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