JPH0158120U - - Google Patents
Info
- Publication number
- JPH0158120U JPH0158120U JP15303587U JP15303587U JPH0158120U JP H0158120 U JPH0158120 U JP H0158120U JP 15303587 U JP15303587 U JP 15303587U JP 15303587 U JP15303587 U JP 15303587U JP H0158120 U JPH0158120 U JP H0158120U
- Authority
- JP
- Japan
- Prior art keywords
- protrusion
- silicon substrate
- differential pressure
- pair
- fluid passage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 7
- 229910052710 silicon Inorganic materials 0.000 claims description 5
- 239000010703 silicon Substances 0.000 claims description 5
- 239000012530 fluid Substances 0.000 claims description 4
- 239000011521 glass Substances 0.000 claims description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 4
- 238000009792 diffusion process Methods 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 229920001296 polysiloxane Polymers 0.000 claims 1
- 238000011144 upstream manufacturing Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Measuring Volume Flow (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15303587U JPH0158120U (en, 2012) | 1987-10-06 | 1987-10-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15303587U JPH0158120U (en, 2012) | 1987-10-06 | 1987-10-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0158120U true JPH0158120U (en, 2012) | 1989-04-11 |
Family
ID=31428509
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15303587U Pending JPH0158120U (en, 2012) | 1987-10-06 | 1987-10-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0158120U (en, 2012) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008501117A (ja) * | 2004-05-24 | 2008-01-17 | ホスピラ・インコーポレイテツド | 組み合わされた流量、気泡、および閉塞の検出器 |
-
1987
- 1987-10-06 JP JP15303587U patent/JPH0158120U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008501117A (ja) * | 2004-05-24 | 2008-01-17 | ホスピラ・インコーポレイテツド | 組み合わされた流量、気泡、および閉塞の検出器 |