JPH0153897B2 - - Google Patents

Info

Publication number
JPH0153897B2
JPH0153897B2 JP19608882A JP19608882A JPH0153897B2 JP H0153897 B2 JPH0153897 B2 JP H0153897B2 JP 19608882 A JP19608882 A JP 19608882A JP 19608882 A JP19608882 A JP 19608882A JP H0153897 B2 JPH0153897 B2 JP H0153897B2
Authority
JP
Japan
Prior art keywords
plasma
reaction chamber
glass tube
introduction port
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP19608882A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5986630A (ja
Inventor
Kenji Fukuda
Takaoki Kaneko
Yoshinobu Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyota Motor Corp
Original Assignee
Toyota Motor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyota Motor Corp filed Critical Toyota Motor Corp
Priority to JP19608882A priority Critical patent/JPS5986630A/ja
Publication of JPS5986630A publication Critical patent/JPS5986630A/ja
Publication of JPH0153897B2 publication Critical patent/JPH0153897B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Treatments Of Macromolecular Shaped Articles (AREA)
JP19608882A 1982-11-10 1982-11-10 プラズマ処理を施す方法および装置 Granted JPS5986630A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19608882A JPS5986630A (ja) 1982-11-10 1982-11-10 プラズマ処理を施す方法および装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19608882A JPS5986630A (ja) 1982-11-10 1982-11-10 プラズマ処理を施す方法および装置

Publications (2)

Publication Number Publication Date
JPS5986630A JPS5986630A (ja) 1984-05-18
JPH0153897B2 true JPH0153897B2 (de) 1989-11-16

Family

ID=16352004

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19608882A Granted JPS5986630A (ja) 1982-11-10 1982-11-10 プラズマ処理を施す方法および装置

Country Status (1)

Country Link
JP (1) JPS5986630A (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61120835A (ja) * 1984-11-19 1986-06-07 Ulvac Corp マイクロ波プラズマ処理装置

Also Published As

Publication number Publication date
JPS5986630A (ja) 1984-05-18

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