JPH0150872B2 - - Google Patents

Info

Publication number
JPH0150872B2
JPH0150872B2 JP59107623A JP10762384A JPH0150872B2 JP H0150872 B2 JPH0150872 B2 JP H0150872B2 JP 59107623 A JP59107623 A JP 59107623A JP 10762384 A JP10762384 A JP 10762384A JP H0150872 B2 JPH0150872 B2 JP H0150872B2
Authority
JP
Japan
Prior art keywords
temperature
measuring device
tester
constant temperature
circuit component
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP59107623A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60252276A (ja
Inventor
Katsumi Takami
Jukichi Yamaguchi
Fujio Ozawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Electronics Engineering Co Ltd
Priority to JP59107623A priority Critical patent/JPS60252276A/ja
Publication of JPS60252276A publication Critical patent/JPS60252276A/ja
Publication of JPH0150872B2 publication Critical patent/JPH0150872B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
JP59107623A 1984-05-29 1984-05-29 回路部品の測定装置 Granted JPS60252276A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59107623A JPS60252276A (ja) 1984-05-29 1984-05-29 回路部品の測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59107623A JPS60252276A (ja) 1984-05-29 1984-05-29 回路部品の測定装置

Publications (2)

Publication Number Publication Date
JPS60252276A JPS60252276A (ja) 1985-12-12
JPH0150872B2 true JPH0150872B2 (cs) 1989-10-31

Family

ID=14463874

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59107623A Granted JPS60252276A (ja) 1984-05-29 1984-05-29 回路部品の測定装置

Country Status (1)

Country Link
JP (1) JPS60252276A (cs)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2520558Y2 (ja) * 1990-06-29 1996-12-18 日立電子エンジニアリング株式会社 低温ハンドラ
JP2757609B2 (ja) * 1991-07-31 1998-05-25 日立電子エンジニアリング株式会社 Ｉｃハンドラの温度制御方法
JP2705420B2 (ja) * 1991-12-27 1998-01-28 日立電子エンジニアリング株式会社 低温ハンドラの温度制御方法

Also Published As

Publication number Publication date
JPS60252276A (ja) 1985-12-12

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